MEMS micro-pump diaphragm service life testing device and testing method thereof
A life test and diaphragm technology, which is applied in the field of MEMS micropump diaphragm life test devices, can solve the problems of inconvenient disassembly, complicated MEMS micropump processing technology, low installation and test efficiency, etc.
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[0037] The specific embodiments of the present invention will be described below in conjunction with the drawings.
[0038] Such as figure 1 , figure 2 , image 3 with Figure 4 As shown, a MEMS micropump diaphragm life test device of this embodiment includes a pressure accumulating container 1, a sensor interface 11 is provided on the top of the pressure accumulating container 1, and a valve interface 12 and a pump interface 14 are opened on the side of the pressure accumulation container 1. A four-way pipeline 10 is opened inside the pressure storage vessel 1; the first orifice of the four-way pipeline 10 communicates with the sensor interface 11, the second orifice of the four-way pipeline 10 communicates with the valve interface 12, and the four-way pipeline 10 The third orifice of the four-way pipe 10 is in communication with the pump interface 14, and the fourth orifice of the four-way pipe 10 penetrates down to the bottom surface of the pressure accumulator 1; A diaphragm...
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