MEMS micro-pump diaphragm service life testing device and testing method thereof

Abstract

The invention relates to an MEMS micro-pump diaphragm service life testing device and a testing method thereof. The MEMS micro-pump diaphragm service life testing device comprises a pressure storage container, a sensor interface is arranged at the top thereof, a valve interface and a pump interface arranged on the side surface, and a four-way pipeline arranged in the pressure storage container; three pipe orifices of the four-way pipeline are respectively communicated with a sensor interface, a valve interface and a pump interface, and the fourth pipe orifice downwards penetrates through the pressure storage container; a diaphragm is attached to the bottom surface of the pressure storage container at the fourth pipe orifice, and is driven by a piezoelectric plate to vibrate; the sensor interface is connected with a pressure sensor, the valve interface is connected with a pressure relief branch and an electromagnetic valve, and the pump interface is connected with a liquid supplementingbranch and a liquid supplementing pump; the electromagnetic valve and the liquid supplementing pump are controlled by a control unit to work, the pressure sensor is matched for monitoring, liquid with a preset pressure value is supplemented into the four-way pipeline, the piezoelectric plate drives the diaphragm to vibrate for a preset number of times under preset pressure, and the service life test is completed. The device is simple and compact, is convenient to use, achieves the testing of the service life of the micro-pump diaphragm, greatly reduces the testing period, and greatly reducesthe testing cost.

Description

technical field [0001] The invention relates to the field of technical diaphragm test devices, in particular to a MEMS micropump diaphragm life test device and a test method thereof. Background technique [0002] In the existing technology, the processing technology of MEMS micropump is complicated, the processing precision is high, the sample trial production cycle is long, and the processing cost is high; the diaphragm is the core part of the MEMS micropump, and the life of the diaphragm is decisive for the life of the MEMS micropump. Therefore, it is often necessary to install MEMS micropumps equipped with diaphragms of different thicknesses and shapes, and conduct life tests on MEMS micropumps to verify the rationality of the design parameters and working parameters of the corresponding MEMS micropump diaphragms. However, after the MEMS micropump is manufactured, it is not easy to disassemble, the installation and test efficiency is low, and the diaphragm will be damaged...

AI Technical Summary

Problems solved by technology

[0002] In the existing technology, the processing technology of MEMS micropump is complicated, the processing precision is high, the sample trial production cycle is long, and the processing cost is high; the diaphragm is the core part of the MEMS micropump, and the life of the diaphragm is decisive for the life of the MEMS micropump. Therefore, it is often necessary to install MEMS micropumps equipped with diaphragms of different thicknesses and shapes, and conduct life tests on MEMS micropumps to verify the rationality of the corresponding MEMS micropump diaphragm design parameters and working parameters

However, it is not easy to disassemble the MEMS micropump after it is manufactured, the installation and testing efficiency is low, and the diaphragm will be damaged during the installation process, which greatly affects the progress of the testing work

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