Super-resolution spectral imaging filter structure based on pixel-level spectral modulation

Abstract

The invention belongs to the technical field of filters, and particularly relates to a super-resolution spectral imaging filter structure based on pixel-level spectral modulation, which is composed offour different pixel-level interference films and a full-transmission spectral band. Full-transmission pixels are arranged in four neighborhoods of each spectral modulation pixel; and four differentchannels of the narrow-band spectral modulation pixel are arranged in the four neighborhoods of each full-transmission pixel. The novel structure comprises five different optical channels, can form asnapshot spectral imaging sensor with pixel-level spectral modulation capability and high-resolution and super-resolution imaging capability based on a CMOS process, and effectively avoids inter-pixelcrosstalk.

Description

technical field [0001] The invention belongs to the technical field of filters, and in particular relates to a super-resolution spectral imaging filter structure based on pixel-level spectral modulation. Background technique [0002] Spectral imaging technology is a non-contact non-destructive detection technology that can be used for real-time detection of multiple information on the shape and composition of substances. The two-dimensional spatial and one-dimensional spectral information of substances can be obtained simultaneously through spectral imaging technology. Traditional spectral imaging equipment usually uses large core spectroscopic components such as prisms and gratings. With the increase in detection requirements and the increase in the diversity and complexity of the detection environment, a small Low-cost microscopic spectral imaging chips based on thin-film spectroscopy have come out. [0003] The spectral imaging microsystem based on thin-film spectroscop...

AI Technical Summary

Problems solved by technology

[0006] Disadvantage 1: Crosstalk between pixels

[0007] The existing mosaic spectral modulation structure uses interference films to perform pixel-level narrow-band spectral modulation. Adjacent pixels are narrow-band modulations of light waves with different central wavelengths. There is photoelectric crosstalk between adjacent pixels, which affects the accuracy of the acquired spectral data.

[0008] Disadvantage 2: Loss of image resolution

It is difficult to improve the image resolution performance of the sensor under this kind of mosaic structure for data collection

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