Processing equipment with good dustproof effect for semiconductor device manufacturing
A technology for processing equipment and semiconductors, which is applied in semiconductor/solid-state device manufacturing, electrical components, cleaning methods and appliances, etc., and can solve problems such as poor dustproof effect
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[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0030] see Figure 1-8 , an embodiment provided by the present invention:
[0031]A kind of processing equipment for the manufacture of semiconductor devices with good dustproof effect, comprising a support plate 1, a support frame 2 is bolted to the front and back of the top of the support plate 1, a processing box 3 is bolted to the top of the support frame 2, and the processing box 3 The inner cavity of the processing box 3 is provided with a dust-proof me...
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