Sliding type semi-closed cleaning device and cleaning method

Abstract

The invention relates to the technical field of cleaning devices, and particularly relates to a sliding type semi-closed cleaning device and a cleaning method. The device comprises a cleaning mechanism, a protection mechanism and a support mechanism, the protection mechanism is arranged in the circumferential direction of the cleaning mechanism, a circumferential air pipe is arranged at the inner side of the protection mechanism, the air-outlet direction of the circumferential air pipe obliquely points to the protection mechanism from top to bottom, the support mechanism is provided with a support position, the bottom of the support position is provided with an inclined liquid drainage surface, and the bottom of the liquid drainage surface is provided with a liquid drainage hole. Compared with the prior art, the cleaning device is advantageous in that to-be-cleaned objects on the stations can be cleaned, and functions of air showering and air drying can be achieved; the support mechanism has the function of automatically adsorbing the to-be-cleaned objects, and absolute fixing of the to-be-cleaned objects can be achieved; cleaning liquid can be prevented from polluting other stations and equipment; rapid recovery of waste liquid can be realized, the waste liquid can be rapidly extracted, and accumulation is prevented; and residual gas can be pumped away, the influence on the external environment is reduced, and waste liquid steam is prevented from polluting the working environment.

Description

technical field [0001] The invention relates to the technical field of cleaning devices, in particular to a sliding semi-closed cleaning device and a cleaning method. Background technique [0002] Before performing related operations on the substrate, such as coating, etching, etc., the substrate needs to be cleaned, because the cleanliness of the substrate itself has a great influence on the subsequent operations and the quality of the product after the operation is completed. important influence. However, in the existing cleaning device, after cleaning the substrate, there will be liquid remaining on the bearing mechanism carrying the substrate, and steam gas will be generated during the cleaning process, and the remaining liquid and steam gas will pollute the working environment. The random discharge of the residual liquid and gas generated during the cleaning process will also pollute the external environment. [0003] At the same time, during the cleaning process, the...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the deficiencies of the prior art, to provide a sliding type semi-closed cleaning device and cleaning method, to solve at least one of the following technical problems: after cleaning, the residual liquid accumulates on the lower side of the object to be cleaned The problem of recycling; the pollution of the working environment after cleaning; the problem of the external environment polluted by the discharge of waste liquid and waste gas; the problem of difficulty in fixing the objects to be cleaned during the cleaning process

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