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Transaction request processing method and semiconductor production system

A transaction request and processing method technology, applied in semiconductor/solid-state device manufacturing, data processing applications, general control systems, etc., can solve the problems of manufacturing execution system 1' reservation failure, production efficiency impact, etc., to improve the reservation success rate, The effect of improving production efficiency

Pending Publication Date: 2021-10-22
CHANGXIN MEMORY TECH INC
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  • Claims
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Problems solved by technology

[0003] However, when the MES 1' and the machine control system 2' send transaction requests at the same time, the machine control system 2' will reject the request of the MES 1' to ensure safe operation and avoid deadlock, which often causes the MES to 1'Appointment failure; according to daily statistics, in normal production, the number of times the above-mentioned appointment failures occur in semiconductor factories can be as high as hundreds or thousands of times a day. It can be seen that the above-mentioned problems have a relatively large impact on production efficiency

Method used

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  • Transaction request processing method and semiconductor production system
  • Transaction request processing method and semiconductor production system
  • Transaction request processing method and semiconductor production system

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[0041] In order to better understand the purpose, technical solution and technical effect of the present invention, the present invention will be further explained below in conjunction with the accompanying drawings and embodiments. At the same time, it is stated that the embodiments described below are only used to explain the present invention, and are not intended to limit the present invention.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terms used herein in the specification of the application are only for the purpose of describing specific embodiments, and are not intended to limit the application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0043] In the case of using "comprising", "having", and "comprising" described herein, anot...

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Abstract

The invention discloses a transaction request processing method. The method comprises the following steps: completing information exchange between a manufacturing execution system and a machine control system through an agent module, wherein the information exchange comprises the steps that the machine control system sends a first transaction request to the agent module, and then the agent module sends the first transaction request to the manufacturing execution system. The invention has the advantages that the agent module is arranged to replace the machine control module to send the first transaction request, so that the situation that the machine control system is locked when receiving the first transaction request is avoided, then the reservation success rate when the manufacturing execution system sends the second transaction request to the machine control system is effectively improved, and then the production efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor production systems, in particular to a transaction request processing method and a semiconductor production system. Background technique [0002] Such as figure 1 As shown, in order to reduce the burden of manpower, improve the quality of operation and reduce manufacturing costs, the semiconductor field (Semiconductor) generally uses Manufacturing Execution System 1' (Manufacturing Execution System, MES) and Machine Control System 2' (Tool Control System , TCS) to improve work efficiency. [0003] However, when the MES 1' and the machine control system 2' send transaction requests at the same time, the machine control system 2' will reject the request of the MES 1' to ensure safe operation and avoid deadlock, which often causes the MES to 1'Appointment failure: According to daily statistics, in normal production, the number of the above-mentioned appointment failures in a semiconductor fac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F9/52G06Q10/02G06Q40/04G06Q50/04H01L21/67
CPCG06F9/524G06Q10/02G06Q40/04G06Q50/04H01L21/67276H01L21/67G06F9/52Y02P90/02G05B19/4186G05B19/41835G05B2219/32126G05B19/41865G05B2219/25202G05B2219/25204G05B2219/25394G05B2219/2602
Inventor 黎焕诚
Owner CHANGXIN MEMORY TECH INC
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