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Short arc type mercury lamp

A mercury lamp, short-arc technology, applied to discharge lamps, gas discharge lamps, parts of gas discharge lamps, etc., can solve problems that do not involve rise characteristics, and achieve the effect of improving rise time and rise characteristics

Inactive Publication Date: 2007-05-09
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] However, this document only deals with the problem of the deformation and breakage characteristics of the glass tube, but not with the rising characteristics at start-up

Method used

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Examples

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Embodiment Construction

[0026] Fig. 1 shows an embodiment of a short-arc type mercury lamp according to the present invention.

[0027] The mercury lamp 10 can be composed of, for example, a light emitting part 11 made of quartz glass and rod-shaped sealing parts 12 extending from the light emitting part 11 to both ends. The light emitting part 11 is composed of a main light emitting space part 110 and a foundation space part 111 . In the main light emitting space portion 110, the cathode 20 and the anode 30 are arranged facing each other with a gap of about 5.0 mm, for example, and an arc bright spot is formed at the end of the cathode.

[0028] The light emitting part 11 has a spherical shape or a spindle shape elongated in the tube axis direction (vertical direction in the drawing). This mercury lamp 10 is a vertical arrangement type lighting in which the cathode is arranged below and the anode is arranged above.

[0029] The cathode 20 is, for example, a cylindrical rod-shaped body made of thor...

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Abstract

The present invention provides a short arc type mercury lamp which has a good rising characteristics among large mercury lamps. The lamp comprises the following parts: a light emitter (11) in which a pair of electrodes (20 and 30) are arranged to face each other with mercury and noble gas sealed up, and a sealer (12) formed at both ends. The light emitter (11) comprises a main light emission space (110) and a root space (111) formed on the sealing side of the main light emission space (110). The ratio V2 / V1 is 0.01-0.09, where V1 is internal volume of the main light emission space (110) and V2 is that of the root space part (112).

Description

technical field [0001] The present invention relates to a short-arc mercury lamp, in particular to a short-arc mercury lamp whose light-emitting part is composed of a main light-emitting space part and a root space part. Background technique [0002] In the field of exposure of semiconductors and liquid crystals, exposure technology using a short-arc mercury lamp is used as a light source. [0003] In the exposure of semiconductors, due to chromatic aberration, etc., it is suitable for emitting light with a wavelength of 365nm (i-line) efficiently, and in the exposure of liquid crystals and printed substrates, it is suitable for emitting light with a wavelength of 300nm to 450nm. [0004] Therefore, mercury is used as a luminescent substance enclosed in the lamp, and a rare gas such as argon or xenon is also enclosed as a starting gas. [0005] In addition, from the perspective of the exposure apparatus, the exposure area to the object to be irradiated gradually becomes lar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J61/24H01J61/20
CPCH01J61/822H01J61/30
Inventor 加藤雅规安田幸夫
Owner USHIO DENKI KK
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