Magnetic recording medium, method for manufacturing recording medium and magnetic recording apparatus
a technology of magnetic recording and recording media, which is applied in the field of magnetic recording media, methods for manufacturing recording media and magnetic recording apparatus, can solve the problems of large influence on the signal to noise ratio, large noise signals which appear at the boundary regions between recording bits, and inability to control the crystalline grains of the magnetic layer and the under layer, etc., to achieve high density recording, small grain size, and increase the effect of signal to noise ratio
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example 1
[0066] Nonmagnetic 2.5 inches glass substrates were put into a vacuum chamber of an ANELVA Co. c-3010 type sputtering apparatus.
[0067] The vacuum chambers of the sputtering apparatus were evacuated to 1×10−6 Pa or less. Then the substrates were heated using an infrared heater up to about 300° C. Keeping the substrate temperature to about 300° C., about 200 nm CoZrNb film was deposited as a soft magnetic under-layer, and then an about 30 nm Cu film was deposited. The substrate temperature was then elevated to about 500° C., and nitrogen ions were irradiated to the Cu film surface in 0.1 Pa nitrogen gas atmosphere using ion gun at 200 eV. After the nitrogen ion irradiation, a 5 nm Fe50Pt50 film was deposited.
[0068] And then a 5 nm carbon film was deposited. For depositing CoZrNb film, Cu film, Fe50Pt50 film and C film, the Ar gas pressure was 0.7 Pa, 0.7 Pa, 5 Pa and 0.7 Pa, respectively, and target material was CoZrNb, Cu, Fe50Pt50, and C, respectively. The sputtering was performed...
example 2
[0084] Nonmagnetic 2.5 inches glass substrates were put into the vacuum chambers and the vacuum chambers were evacuated to 1×104 Pa or less. Then CoZrNb soft magnetic under-layer, Cu deposition and nitrogen deposition process were performed using the method described in Example 1. Then a 5 nm Fe50Pt50—SiO2 magnetic-layer was formed using (Fe50—Pt50)-10 mol % SiO2 composite target. Furthermore, magnetic disks having CO50Pt50, Fe50Pd50 and CO70Cr10Pt20 respectively replacing Fe50Pt50-layer of the disks in example 1 were fabricated using respective targets. Similarly, magnetic disks having TiO, Al2O3, TiC and TaC respectively, were fabricated replacing SiO2-layer in Example 1. Then carbon protective-layer was deposited and lubricant-layer was coated for each fabricated magnetic recording medium.
[0085] Table 2 shows SNRm values and dPW50 values for each magnetic recording medium. Magnetic recording media having magnetic recording-layer composite with the chemical compounds show increas...
example 3
[0086] 2.5 inch hard disk shaped nonmagnetic glass substrates were prepared and film depositions were performed using the process of Example 1 up to nitrogen deposition treatment. Then 10 nm Pt—SiO2 layer was deposited using Pt-10 mol % SiO2 composite target. On the Pt—SiO2-layer, various magnetic recording-layers were deposited and then various magnetic recording media were obtained after depositing carbon protective-layer and coating lubricant-layer using the procedure described in Example 2. In addition, magnetic recording media having Pd, Ir, Ag, Cu, Ru and Rh under-layer, respectively, instead of the Pt under-layer, and magnetic recording media having TiO, Al2O3, MgO, TiC and TaC under-layer, respectively, instead of the SiO2 under-layer were obtained using respective composite targets.
[0087] Table 3 shows SNRm and dPW50 for each magnetic recording medium having CoCrPt—SiO2 magnetic recording-layer and various under-layers.
TABLE 3signal tohalf widthnoise ratiodPW50Under laye...
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