40results about "Coating by sputtering" patented technology

A magnetic recording medium includes a substrate, an underlayer, a first magnetic layer, and a second magnetic layer in this order. The first magnetic layer includes magnetic grains having a L10 structure, and the second magnetic layer has a granular structure including magnetic grains having a L10 structure, and a grain boundary portion including hexagonal boron nitride. A (111) plane of the magnetic grains included in the first magnetic layer is covered with boron nitride at an interface with the second magnetic layer. The magnetic grains included in the second magnetic layer are epitaxially grown from a (001) plane of the magnetic grains included in the first magnetic layer. The magnetic grains included in the first magnetic layer and the magnetic grains included in the second magnetic layer are columnar crystals penetrating the first magnetic layer and the second magnetic layer, respectively.

To provide a method for producing a magnetic recording medium capable of having a magnetic layer with high crystal orientation and few defects, a magnetic recording medium, and a magnetic storage device.SOLUTION: A method of producing a magnetic recording medium 1 includes: a step of forming a magnesium oxide underlayer 20 on a surface of a substrate 10 by a sputtering method with using a target containing magnesium oxide; and a step of forming a magnetic layer 30 on the surface side of the magnesium oxide underlayer 20, in which the target containing the magnesium oxide is heated to more than 600°C when forming the magnesium oxide underlayer 20.SELECTED DRAWING: Figure 1

The present invention provides a sputtering apparatus and a thin film manufacturing method that can improve the uniformity of the in-plane film thickness distribution of a thin film formed on a substrate. [Solution] The sputtering apparatus according to the present disclosure is a sputtering apparatus that uses a magnetic field generated from the back side of a target toward a substrate provided opposite the front surface of the target to deposit sputtering particles of the target onto the substrate and form a thin film, comprising: a magnetic field generating unit provided on the back surface of the target; a rotating unit for rotating the magnetic field generating unit; and a cylindrical sputtering adjustment member provided on a central axis between the target and the substrate, connecting a position corresponding to the center of the target and the center of the substrate, wherein the sputtering adjustment member is made of metal and the holes in the sputtering adjustment member are provided to include the central axis.

To provide a sputtering target capable of favorably suppressing occurrence of cracks and fractures during a manufacturing process.SOLUTION: A sputtering target having (1) Fe, (2) Pt, (3) one or more elements selected from Ag, Au, B, Co, Cr, Cu, Ga, Ge, Mn, Mo, Nb, Ni, Pd, Re, Rh, Ru, Si, Sn, Ta, W, V, and Zn, and (4) the remainder, the atomic ratio between (1) Fe and (2) Pt being 34-55 at%, the total concentration of (1) Fe and (2) Pt being 50 mol% or above, the total content of the elements (3) being 0.5-15 mol%, the remainder (4) being an oxide and optionally including impurities, the volume ratio of the oxide being 40 vol.% or more, and a number-average equivalent circle diameter, calculated on the assumption that the shape of the oxide in the oxide phase is a circle and calculated using ImageJ using an SEM image having a visual field magnification of 3000, of 1.3 μm or less.SELECTED DRAWING: Figure 1

The present invention relates to a sputtering target for a magnetic recording medium containing Co and Pt as metal components and containing at least one oxide. In the present invention, as an essential oxide for improving magnetic separation, tungsten oxide and / or molybdenum oxide is contained, and the content of the essential oxide is 15 vol% or less. As the oxide in the sputtering target, other oxides such as B2O3 can also be contained as optional oxides, and in this case, the total oxide content is preferably 20 vol% or more and 50 vol% or less. In the present invention, by applying the essential oxide, the total oxide content can be appropriately set while ensuring magnetic separation. According to the present invention, a granular thin film composed of a CoPt-based alloy having good magnetic separation can be formed.

To provide a glass for a magnetic recording medium substrate, a magnetic recording medium substrate, a magnetic recording medium, a glass spacer for a magnetic recording / reproducing device, and a magnetic recording / reproducing device, each of which has excellent chemical resistance and impact resistance.SOLUTION: A glass for a magnetic recording medium substrate is an amorphous glass with a SiO2 content of 54 mol% or more and 62 mol% or less, a MgO content of 15 mol% or more and 28 mol% or less, a Li2O content of 0.2 mol% or more, and a Na2O content of 5 mol% or less.SELECTED DRAWING: None

The purpose of the present invention is to provide a magnetic recording medium which stably maintains a state in which a granular magnetic layer forms a granular structure therein, and which improves the surface recording density. The magnetic recording medium has a substrate, an underlayer, a first magnetic layer, and a second magnetic layer in this order, the first magnetic layer including magnetic particles having an L10 structure, and the second magnetic layer including magnetic particles having an L10 structure and having a granular structure including a grain boundary portion of hexagonal boron nitride. The (111) plane of the magnetic particles contained in the first magnetic layer is covered with an alloy of VN, Si3N4, YN, or TiN at the interface with the second magnetic layer, and the magnetic particles contained in the second magnetic layer are epitaxially grown from the (001) plane of the magnetic particles contained in the first magnetic layer. The magnetic particles contained in the first magnetic layer and the magnetic particles contained in the second magnetic layer are each columnar crystals penetrating the first magnetic layer and the second magnetic layer.

The invention provides a sputtering device and a method for manufacturing a thin film, which can improve the uniformity of the in-plane film thickness distribution of the thin film formed on a substrate. The sputtering apparatus according to the present disclosure forms a thin film by attaching sputtering particles of a target to a substrate provided facing the front surface of the target using a magnetic field generated from the back surface side of the target toward the substrate, the sputtering apparatus comprising: a magnetic field generation unit provided on the back surface of the target; a rotating unit that rotates the magnetic field generating unit; and a cylindrical sputtering adjustment member provided on a central axis between the target and the substrate, the central axis connecting the center of the target and a position located at the center of the substrate, the sputtering adjustment member being made of metal, and the hole of the sputtering adjustment member being provided so that the central axis is included.

The present invention provides a magnetic recording medium that stably maintains a state in which a granular magnetic layer forms a granular structure internally, thereby further improving the areal recording density. [Solution] The magnetic recording medium 1 comprises a substrate 10, an underlayer 20, a first magnetic layer 30, and a second magnetic layer 40 in this order. The first magnetic layer contains magnetic particles having an L10 structure, and the second magnetic layer has a granular structure with magnetic particles having an L10 structure and grain boundaries containing hexagonal boron nitride. The (111) plane of the magnetic particles contained in the first magnetic layer is covered with an alloy of VN, Si3N4, YN, or TiN at the interface with the second magnetic layer. The magnetic particles contained in the second magnetic layer are epitaxially grown from the (001) plane of the magnetic particles contained in the first magnetic layer. The magnetic particles contained in the first magnetic layer and the magnetic particles contained in the second magnetic layer are columnar crystals that penetrate the first magnetic layer and the second magnetic layer, respectively.

Provided is a magnetic recording medium that is capable of increasing the reproduction output.A magnetic recording medium is a tape-shaped magnetic recording medium and includes a recording layer. A nucleation magnetic field Hn of the magnetic recording medium satisfies a relationship of Hn≥0 [Oe], and the magnetic recording medium satisfies a relationship of the following formula (1).(Mrt)0.5×f⁡(Hs)≥0.7(1)(wherein, in the formula (1), Mrt represents a product of a residual magnetization amount Mr of the magnetic recording medium and a thickness t of the recording layer. Hs represents a saturation magnetic field of the magnetic recording medium. In a case where Hs≤8500 [Oe], f(Hs)=1.00, and in a case where Hs>8500 [Oe], f(Hs)=1 / (1+(Hs−8500) / 8500).).

The purpose of the present invention is to provide a magnetic recording medium that has excellent running stability even when stored in a high-temperature environment.　The present invention provides a magnetic recording medium in which, when dynamic viscoelasticity measurement is performed on the magnetic recording medium at a frequency of 10 Hz and a heating rate of 2°C / min, the average value A(E") of the loss elastic modulus E" in the temperature range of 60°C to 65°C is 0.06 GPa or less, and the average height Rpk of the protruding peaks measured using a non-contact profilometer using optical interference is 2.4 nm or less.

The invention belongs to the technical field of thin film materials, and discloses an oxide thin film material for an ultrahigh-density magnetic recording medium and a preparation method and application of the oxide thin film material. The preparation method comprises the following steps: (1) mixing and grinding raw materials including a perovskite oxide material, an antiferromagnetic oxide material and a ferrous or ferromagnetic oxide material to obtain a particle mixture; (2) pre-sintering the particle mixture obtained in the step (1), grinding, putting into a mold, pressing and shaping, and calcining to obtain a composite target material; and (3) putting a single crystal substrate and the composite target material into a pulse laser deposition system or a radio frequency magnetron sputtering system, and performing deposition at 500-700 DEG C under the oxygen pressure of 5-50 Pa to obtain the oxide thin film material. The oxide film material is high in medium coercive field, high in signal-to-noise ratio, good in thermal stability and large in anisotropy, and the three problems of a recording medium are solved to a certain extent.

To provide a manufacturing method of a magnetic recording medium capable of further increasing the recording density by enhancing the perpendicular orientation of a magnetic recording layer, and to provide a magnetic recording and reproducing device equipped with the magnetic recording medium manufactured by the manufacturing method.SOLUTION: A method of manufacturing a magnetic recording medium according to the present invention is a method of manufacturing a magnetic recording medium including, on a non-magnetic substrate, an underlayer, a seed layer, and a magnetic recording layer in this order, wherein the seed layer is formed by forming a film containing two elements of an element α and an element β such that the element α mainly forms a columnar crystal having an fcc structure and the element β mainly forms an amorphous structure, and then etching a surface of the film to form a surface in which the element α and the element β are phase-separated from each other.SELECTED DRAWING: Figure 1

To provide a heating device capable of heating a surface of a workpiece having a disk shape with a hole in the center at high productivity and uniformity, a heating device for heating a workpiece by irradiating workpiece with light includes an irradiating part facing at least one of a pair of main surfaces of workpiece to irradiate workpiece with light. Irradiating part includes plurality of light emitting elements on surface thereof facing the at least one main surface. Surface of the irradiating part facing the workpiece includes first region including a position corresponding to the center of the workpiece, second region surrounding first region from outer side, and third region surrounding second region from outer side and including a position corresponding to the outer periphery of the workpiece. Amount of light emission per unit area in third region is greater than that in each of first and second regions.

Disclosed is a magnetic material target which contains one or more elements selected from Pt, B, Ti, and Si, one or more elements selected from Gd, Ge, Sn, Te, and Hf, and an oxide, with the balance being made up of Co and selectively contained impurities, wherein: the total concentration of Co and Pt is 50 at% or more; the total concentration of B, Ti, and Si is 10 at% or more; the concentration of O is 20 at% or more; and the total concentration of Gd, Ge, Sn, Te, and Hf is 1 at% or more.

To provide FeCo-based alloy and target material each having excellent corrosion resistance and sputtering property.SOLUTION: FeCo-based alloy for a soft magnetic layer includes TCR element and TAM element. The balance is Fe, Co and inevitable impurities. The content (at%) of each element satisfies formula (1) 0.1≤TCR≤10.0, formula (2) 11.0≤TAM≤25.0, formula (3) 16.0≤[TCR / 2+TAM]≤25.0, and formula (4) 0.20≤[Fe / (Fe+Co)]≤0.80. The FeCo-based alloy has microstructure that consisting of (Fe,CO) phases having Fe and / or Co as a main constituent, and intermetallic compound phases including TCR element or TAM element. In this microstructure, the number of (Fe,Co) phases in which the diameter of the minimum circumscribed circle surrounding the outside of the (Fe,Co) phase exceeds 30 μm is 0.SELECTED DRAWING: Figure 1

Various apparatus, systems, methods, and media are disclosed to provide a thermally assisted magnetic recording (HAMR) media having a small recording grain size with a high aspect ratio. An example magnetic recording medium includes: a substrate; the radiating fin layer is positioned on the substrate; the cushion layer comprises MgO (magnesium oxide)-TiO (titanium oxide) and is positioned on the radiating fin layer; the interface layer comprises TiN and is positioned on the cushion layer; a first nucleation layer on the interfacial layer and comprising FePt-Ag-X, where X is an oxide; a second nucleation layer on the first nucleation layer and comprising FePt-Ag-Y, where Y is an oxide or a nitride; and a magnetic recording layer on the second nucleating layer. In another example, the TiN is formed as part of the cushion layer rather than in the interface layer.

To provide a glass for a magnetic recording medium substrate having excellent chemical resistance and impact resistance.SOLUTION: A glass for a magnetic recording medium substrate or a glass spacer for a magnetic recording / reproducing device which is an amorphous glass, in which an SiO2 content is 56 mol% or more, an MgO content is 15 mol% or more and 28 mol% or less, an Li2O content is 0.2 mol% or more, an Na2O content is 5 mol% or less, a total content (Al2O3+MgO+CaO) of Al2O3, MgO and CaO is 29 mol% or more and 36.50 mol% or less, a total content (SiO2+MgO+Li2O+Al2O3+CaO) of SiO2, MgO, Li2O, Al2O3 and CaO is 95.0 mol% or more, a molar ratio [(SiO2+MgO) / Li2O] of a total content of SiO2 and MgO to the Li2O content is 13 or more, and a molar ratio [CaO / (Al2O3+MgO)] of a CaO content to a total content of Al2O3 and MgO is 0.10 or less.SELECTED DRAWING: None

To provide a highly reliable non-magnetic substrate for magnetic recording media. [Solution] A non-magnetic substrate for a magnetic recording medium, which is identified by inspection of the magnetic recording medium 42 as not having a periodic convex shape on its surface, or being below a standard value, wherein the magnetic recording medium has a magnetic layer on the non-magnetic substrate, and in the inspection of the magnetic recording medium by the inspection device 41, the defect portion identified based on the output signal obtained by scanning the surface of the non-magnetic substrate for the magnetic recording medium, which has a magnetic layer formed under heating conditions below a guaranteed temperature, with a thermosensitive resistance element, has a periodic convex shape with a height of 0.1 nm or more and a width of 1 μm or more and a width of 1 μm or more and 15 μm or less.

A sputtering apparatus and a method of manufacturing a magnetic memory device can be provided, the sputtering apparatus including: a chamber; a gas supply source configured to supply a first inert gas and a second inert gas to the chamber, the first inert gas and the second inert gas having first and second evaporation points, respectively, wherein the first evaporation point is higher than the second evaporation point; a plurality of sputtering guns in an upper portion of the chamber; a chuck in a lower portion of the chamber and facing the plurality of sputtering guns, the chuck configured to receive a substrate thereon; and a cooling unit connected to a lower portion of the chuck, the cooling unit configured to cool the chuck to a temperature lower than the first evaporation point and higher than the second evaporation point.

A heater for a disc substrate in a deposition system. The heater has a central first heating zone and an annular second heating zone around the first heating zone. Each of the heating zones has an independently controllable power supply to allow, for example, the second heating zone to be heated to a temperature at least 10° C. greater than the first heating zone.

A magnetic material target comprising one or more of Pt, B, Ti, and Si, one or more of Gd, Ge, Sn, Te, and Hf, and an oxide, with the balance being Co and selectively contained impurities, wherein the total concentration of Co and Pt is 50 at% or more, the total concentration of B, Ti, and Si is 10 at% or more, the concentration of O is 20 at% or more, and the total concentration of Gd, Ge, Sn, Te, and Hf is 1 at% or more.

Provided are: a magnetic recording medium having a high magnetocrystalline anisotropy constant Ku and coercive force Hc; and a sputtering target used to produce this magnetic recording medium.　This Pt-oxide sputtering target is formed from 60 vol% or more but less than 100 vol% of a Pt-based alloy phase and more than 0 vol% but 40 vol% or less of an oxide, the Pt-oxide sputtering target being characterized in that the Pt-based alloy phase contains 50 to 100 at% of Pt.

The present invention provides a sputtering target which enables a magnetic layer of a magnetic recording medium to maintain high coercivity, while being capable of improving magnetic separation between magnetic particles. This sputtering target contains Co and Pt as metal components, while containing NbO2 as a metal oxide component. Alternatively, this sputtering target contains Co and Pt as metal components, while having a phase that contains all of Co, Nb and O.

Various apparatuses, systems, methods, and media are disclosed to provide a magnetic recording medium having a tungsten (W) pre-seed layer. The W pre-seed layer has higher electrical conductivity than a CrTi pre-seed layer having a similar thickness. In one embodiment, the W pre-seed layer is made of about 95 atomic percent or greater than 95 atomic percent W. The W pre-seed layer has a lower resistivity than the CrTi pre-seed layer. Thus, if similar electrical conductivity is achieved, the thickness of the W pre-seed layer can be reduced compared to the thickness of the CrTi pre-seed layer. Magnetic recording materials deposited on top of the W pre-seed layer having the reduced thickness provide comparable crystalline orientation and recording performance to those magnetic recording materials deposited on top of a thicker CrTi pre-seed layer having similar electrical conductivity.

A magnetic recording medium includes, in a following order, a substrate, an underlayer, a first magnetic layer, and a second magnetic layer, wherein the first magnetic layer includes a magnetic particle having an L10 structure, the second magnetic layer has a granular structure including a magnetic particle having an L10 structure, and a grain boundary including hexagonal boron nitride, a (111) plane of the magnetic particle included in the first magnetic layer is covered with an alloy of VN, Si3N4, YN, or TiN at an interface with the second magnetic layer, the magnetic particle in the second magnetic layer epitaxially grows from a (001) plane of the magnetic particle in the first magnetic layer, and the magnetic particle in the first magnetic layer and the magnetic particle in the second magnetic layer are columnar crystals that penetrate the first magnetic layer and the second magnetic layer, respectively.

To provide a magnetic recording medium in which surface recording density is further improved by stably maintaining a state where a granular structure is formed inside a granular magnetic layer.SOLUTION: A substrate, an underlayer, a first magnetic layer, and a second magnetic layer in this order, the first magnetic layer including magnetic grains having a L10 structure, and the second magnetic layer including magnetic grains having a L10 structure and a granular structure having a grain boundary part containing hexagonal boron nitride, the (111) planes of the magnetic grains included in the first magnetic layer are covered with aluminum nitride at the interface with the second magnetic layer, the magnetic grains included in the second magnetic layer are epitaxially grown from the (001) planes of the magnetic grains included in the first magnetic layer, and the magnetic grains included in the first magnetic layer and the magnetic grains included in the second magnetic layer are columnar crystals penetrating the first magnetic layer and the second magnetic layer, respectively.SELECTED DRAWING: Figure 1

The objective of the present invention is to provide a magnetic recording cartridge that, even when stored under a high-temperature environment, enables width correction in the longitudinal direction of the magnetic recording medium by adjusting the travelling tensile force of the tape system or changing the winding direction of the tape system.　This magnetic recording cartridge includes a reel, and a magnetic recording medium having a base layer, with the loss modulus of the base layer at 65 °C being 0.40 GPa or less. When the magnetic recording medium is taken up on the reel and the change in width over the total span of the magnetic recording medium is measured after being stored for 360 hours at 65 °C, the sign of the change in width Δout on the outer side of the roll differs from the sign of the change in width Δin on the inner side of the roll. The change in width is 0 ppm at a location of either of two sections that flank the center line of the total span of the magnetic recording medium, among four sections obtained by dividing the total span of the magnetic recording medium into four equal sections.

A magnetic recording tape 1a is provided with a base material 10, a base layer 20, and a perpendicular magnetic recording layer 30. The substrate 10, the underlayer 20, and the perpendicular magnetic recording layer 30 are arranged in this order in the thickness direction of the underlayer 20. The base layer 20 contains a metal M. The base layer (20) has a boundary section (21) including a boundary surface closest to the base material (10) in the thickness direction of the base layer (20). The content of the metal (M) and elements other than oxygen in the boundary portion (21) is less than 8% in terms of atomic number. The ratio of the oxygen content in the boundary portion 21 relative to the total amount of the constituent elements and oxygen in the central portion 22 is 5% or more based on the number of atoms.

A magnetic material target comprising one or more of Pt, B, Ti, and Si, one or more of Gd, Ge, Sn, Te, and Hf, and an oxide, with the balance being Co and selectively contained impurities, wherein the total concentration of Co and Pt is 50 at% or more, the total concentration of B, Ti, and Si is 10 at% or more, the concentration of O is 20 at% or more, and the total concentration of Gd, Ge, Sn, Te, and Hf is 1 at% or more.