57results about "Coating by sputtering" patented technology

The present application relates to a write head, a write head device, a write head manufacturing method and a magnetizing method. The write head comprises: a second wafer, comprising a silicon body, and a first oxide layer and a second oxide layer which are located on the upper surface and the lower surface of the silicon body, respectively; and a magnetic pole array penetrating through the silicon body, and having a magnetic pole writing end located above the second oxide layer and directly facing one Z-bridge arm, and a magnetic pole supporting end surrounded by the first oxide layer, the magnetic pole array being a hard magnetic pole array, and having a magnetic moment in a +Z-direction or a -Z-direction; or the magnetic pole array being a soft magnetic pole array surrounded by a primary coil, and direct current passing through the primary coil and generating a magnetic moment in the +Z-direction or -Z-direction in the soft magnetic pole, wherein during writing, the magnetic pole writing end generates in a pinning layer of the Z-bridge arm a direct-current writing magnetic field comprising a Z-direction component, so that the magnetic moment of the pinning layer turns to the direction of the direct-current writing magnetic field comprising the Z-direction component. The present invention has the advantages of simple structure, high writing efficiency, low price and the like.

A sputtering target according to the present invention contains Co and Pt as metal components, wherein a molar ratio of a content of Pt to a content of Co is from 5 / 100 to 45 / 100, and wherein the sputtering target contains Nb2O5 as a metal oxide component.

A magnetic recording medium includes a substrate, an underlayer, a first magnetic layer, and a second magnetic layer in this order. The first magnetic layer includes magnetic grains having a L10 structure, and the second magnetic layer has a granular structure including magnetic grains having a L10 structure, and a grain boundary portion including hexagonal boron nitride. A (111) plane of the magnetic grains included in the first magnetic layer is covered with boron nitride at an interface with the second magnetic layer. The magnetic grains included in the second magnetic layer are epitaxially grown from a (001) plane of the magnetic grains included in the first magnetic layer. The magnetic grains included in the first magnetic layer and the magnetic grains included in the second magnetic layer are columnar crystals penetrating the first magnetic layer and the second magnetic layer, respectively.

To provide a method for producing a magnetic recording medium capable of having a magnetic layer with high crystal orientation and few defects, a magnetic recording medium, and a magnetic storage device.SOLUTION: A method of producing a magnetic recording medium 1 includes: a step of forming a magnesium oxide underlayer 20 on a surface of a substrate 10 by a sputtering method with using a target containing magnesium oxide; and a step of forming a magnetic layer 30 on the surface side of the magnesium oxide underlayer 20, in which the target containing the magnesium oxide is heated to more than 600°C when forming the magnesium oxide underlayer 20.SELECTED DRAWING: Figure 1

The present invention provides a sputtering apparatus and a thin film manufacturing method that can improve the uniformity of the in-plane film thickness distribution of a thin film formed on a substrate. [Solution] The sputtering apparatus according to the present disclosure is a sputtering apparatus that uses a magnetic field generated from the back side of a target toward a substrate provided opposite the front surface of the target to deposit sputtering particles of the target onto the substrate and form a thin film, comprising: a magnetic field generating unit provided on the back surface of the target; a rotating unit for rotating the magnetic field generating unit; and a cylindrical sputtering adjustment member provided on a central axis between the target and the substrate, connecting a position corresponding to the center of the target and the center of the substrate, wherein the sputtering adjustment member is made of metal and the holes in the sputtering adjustment member are provided to include the central axis.

To provide a sputtering target capable of favorably suppressing occurrence of cracks and fractures during a manufacturing process.SOLUTION: A sputtering target having (1) Fe, (2) Pt, (3) one or more elements selected from Ag, Au, B, Co, Cr, Cu, Ga, Ge, Mn, Mo, Nb, Ni, Pd, Re, Rh, Ru, Si, Sn, Ta, W, V, and Zn, and (4) the remainder, the atomic ratio between (1) Fe and (2) Pt being 34-55 at%, the total concentration of (1) Fe and (2) Pt being 50 mol% or above, the total content of the elements (3) being 0.5-15 mol%, the remainder (4) being an oxide and optionally including impurities, the volume ratio of the oxide being 40 vol.% or more, and a number-average equivalent circle diameter, calculated on the assumption that the shape of the oxide in the oxide phase is a circle and calculated using ImageJ using an SEM image having a visual field magnification of 3000, of 1.3 μm or less.SELECTED DRAWING: Figure 1

The present invention relates to a sputtering target for a magnetic recording medium containing Co and Pt as metal components and containing at least one oxide. In the present invention, as an essential oxide for improving magnetic separation, tungsten oxide and / or molybdenum oxide is contained, and the content of the essential oxide is 15 vol% or less. As the oxide in the sputtering target, other oxides such as B2O3 can also be contained as optional oxides, and in this case, the total oxide content is preferably 20 vol% or more and 50 vol% or less. In the present invention, by applying the essential oxide, the total oxide content can be appropriately set while ensuring magnetic separation. According to the present invention, a granular thin film composed of a CoPt-based alloy having good magnetic separation can be formed.

To provide a glass for a magnetic recording medium substrate, a magnetic recording medium substrate, a magnetic recording medium, a glass spacer for a magnetic recording / reproducing device, and a magnetic recording / reproducing device, each of which has excellent chemical resistance and impact resistance.SOLUTION: A glass for a magnetic recording medium substrate is an amorphous glass with a SiO2 content of 54 mol% or more and 62 mol% or less, a MgO content of 15 mol% or more and 28 mol% or less, a Li2O content of 0.2 mol% or more, and a Na2O content of 5 mol% or less.SELECTED DRAWING: None

The purpose of the present invention is to provide a magnetic recording medium which stably maintains a state in which a granular magnetic layer forms a granular structure therein, and which improves the surface recording density. The magnetic recording medium has a substrate, an underlayer, a first magnetic layer, and a second magnetic layer in this order, the first magnetic layer including magnetic particles having an L10 structure, and the second magnetic layer including magnetic particles having an L10 structure and having a granular structure including a grain boundary portion of hexagonal boron nitride. The (111) plane of the magnetic particles contained in the first magnetic layer is covered with an alloy of VN, Si3N4, YN, or TiN at the interface with the second magnetic layer, and the magnetic particles contained in the second magnetic layer are epitaxially grown from the (001) plane of the magnetic particles contained in the first magnetic layer. The magnetic particles contained in the first magnetic layer and the magnetic particles contained in the second magnetic layer are each columnar crystals penetrating the first magnetic layer and the second magnetic layer.

The invention provides a sputtering device and a method for manufacturing a thin film, which can improve the uniformity of the in-plane film thickness distribution of the thin film formed on a substrate. The sputtering apparatus according to the present disclosure forms a thin film by attaching sputtering particles of a target to a substrate provided facing the front surface of the target using a magnetic field generated from the back surface side of the target toward the substrate, the sputtering apparatus comprising: a magnetic field generation unit provided on the back surface of the target; a rotating unit that rotates the magnetic field generating unit; and a cylindrical sputtering adjustment member provided on a central axis between the target and the substrate, the central axis connecting the center of the target and a position located at the center of the substrate, the sputtering adjustment member being made of metal, and the hole of the sputtering adjustment member being provided so that the central axis is included.

The present invention provides a magnetic recording medium that stably maintains a state in which a granular magnetic layer forms a granular structure internally, thereby further improving the areal recording density. [Solution] The magnetic recording medium 1 comprises a substrate 10, an underlayer 20, a first magnetic layer 30, and a second magnetic layer 40 in this order. The first magnetic layer contains magnetic particles having an L10 structure, and the second magnetic layer has a granular structure with magnetic particles having an L10 structure and grain boundaries containing hexagonal boron nitride. The (111) plane of the magnetic particles contained in the first magnetic layer is covered with an alloy of VN, Si3N4, YN, or TiN at the interface with the second magnetic layer. The magnetic particles contained in the second magnetic layer are epitaxially grown from the (001) plane of the magnetic particles contained in the first magnetic layer. The magnetic particles contained in the first magnetic layer and the magnetic particles contained in the second magnetic layer are columnar crystals that penetrate the first magnetic layer and the second magnetic layer, respectively.

Provided is a magnetic recording medium that is capable of increasing the reproduction output.A magnetic recording medium is a tape-shaped magnetic recording medium and includes a recording layer. A nucleation magnetic field Hn of the magnetic recording medium satisfies a relationship of Hn≥0 [Oe], and the magnetic recording medium satisfies a relationship of the following formula (1).(Mrt)0.5×f⁡(Hs)≥0.7(1)(wherein, in the formula (1), Mrt represents a product of a residual magnetization amount Mr of the magnetic recording medium and a thickness t of the recording layer. Hs represents a saturation magnetic field of the magnetic recording medium. In a case where Hs≤8500 [Oe], f(Hs)=1.00, and in a case where Hs>8500 [Oe], f(Hs)=1 / (1+(Hs−8500) / 8500).).

Systems and processes described herein are for forming a material by applying a magnetic material and a boundary material to the substrate; and while applying the magnetic material to the substrate and the boundary material to the substrate, applying a bias voltage to at least the boundary material to form a two-dimensional material between portions of the magnetic material. The material includes the magnetic material and a two-dimensional material confirming to the magnetic material or other material.

The purpose of the present invention is to provide a magnetic recording medium that has excellent running stability even when stored in a high-temperature environment.　The present invention provides a magnetic recording medium in which, when dynamic viscoelasticity measurement is performed on the magnetic recording medium at a frequency of 10 Hz and a heating rate of 2°C / min, the average value A(E") of the loss elastic modulus E" in the temperature range of 60°C to 65°C is 0.06 GPa or less, and the average height Rpk of the protruding peaks measured using a non-contact profilometer using optical interference is 2.4 nm or less.

The invention belongs to the technical field of thin film materials, and discloses an oxide thin film material for an ultrahigh-density magnetic recording medium and a preparation method and application of the oxide thin film material. The preparation method comprises the following steps: (1) mixing and grinding raw materials including a perovskite oxide material, an antiferromagnetic oxide material and a ferrous or ferromagnetic oxide material to obtain a particle mixture; (2) pre-sintering the particle mixture obtained in the step (1), grinding, putting into a mold, pressing and shaping, and calcining to obtain a composite target material; and (3) putting a single crystal substrate and the composite target material into a pulse laser deposition system or a radio frequency magnetron sputtering system, and performing deposition at 500-700 DEG C under the oxygen pressure of 5-50 Pa to obtain the oxide thin film material. The oxide film material is high in medium coercive field, high in signal-to-noise ratio, good in thermal stability and large in anisotropy, and the three problems of a recording medium are solved to a certain extent.

To provide a manufacturing method of a magnetic recording medium capable of further increasing the recording density by enhancing the perpendicular orientation of a magnetic recording layer, and to provide a magnetic recording and reproducing device equipped with the magnetic recording medium manufactured by the manufacturing method.SOLUTION: A method of manufacturing a magnetic recording medium according to the present invention is a method of manufacturing a magnetic recording medium including, on a non-magnetic substrate, an underlayer, a seed layer, and a magnetic recording layer in this order, wherein the seed layer is formed by forming a film containing two elements of an element α and an element β such that the element α mainly forms a columnar crystal having an fcc structure and the element β mainly forms an amorphous structure, and then etching a surface of the film to form a surface in which the element α and the element β are phase-separated from each other.SELECTED DRAWING: Figure 1

To provide a heating device capable of heating a surface of a workpiece having a disk shape with a hole in the center at high productivity and uniformity, a heating device for heating a workpiece by irradiating workpiece with light includes an irradiating part facing at least one of a pair of main surfaces of workpiece to irradiate workpiece with light. Irradiating part includes plurality of light emitting elements on surface thereof facing the at least one main surface. Surface of the irradiating part facing the workpiece includes first region including a position corresponding to the center of the workpiece, second region surrounding first region from outer side, and third region surrounding second region from outer side and including a position corresponding to the outer periphery of the workpiece. Amount of light emission per unit area in third region is greater than that in each of first and second regions.

The invention relates to glass, a magnetic recording medium substrate, a magnetic recording medium, a glass spacer for a magnetic recording / reproducing device, and a magnetic recording / reproducing device. The invention provides a glass for a glass spacer for a magnetic recording medium substrate or a magnetic recording / reproducing device. The present invention relates to a glass which has a SiO2 content of 56 mol% or more, a MgO content of 15 mol% to 28 mol% (inclusive), a Li2O content of 0.2 mol% or more, a Na2O content of 5 mol% or less, a total content of Al2O3, MgO and CaO of 29.0 mol% to 36.50 mol% (inclusive), a total content of SiO2, MgO, Li2O, Al2O3 and CaO of 95 mol% or more, and a molar ratio of the total content of SiO2 and MgO to the content of Li2O of 13 or more. And an amorphous glass in which the molar ratio of the CaO content to the total content of Al2O3 and MgO is 0.10 or less.

Disclosed is a magnetic material target which contains one or more elements selected from Pt, B, Ti, and Si, one or more elements selected from Gd, Ge, Sn, Te, and Hf, and an oxide, with the balance being made up of Co and selectively contained impurities, wherein: the total concentration of Co and Pt is 50 at% or more; the total concentration of B, Ti, and Si is 10 at% or more; the concentration of O is 20 at% or more; and the total concentration of Gd, Ge, Sn, Te, and Hf is 1 at% or more.

To provide FeCo-based alloy and target material each having excellent corrosion resistance and sputtering property.SOLUTION: FeCo-based alloy for a soft magnetic layer includes TCR element and TAM element. The balance is Fe, Co and inevitable impurities. The content (at%) of each element satisfies formula (1) 0.1≤TCR≤10.0, formula (2) 11.0≤TAM≤25.0, formula (3) 16.0≤[TCR / 2+TAM]≤25.0, and formula (4) 0.20≤[Fe / (Fe+Co)]≤0.80. The FeCo-based alloy has microstructure that consisting of (Fe,CO) phases having Fe and / or Co as a main constituent, and intermetallic compound phases including TCR element or TAM element. In this microstructure, the number of (Fe,Co) phases in which the diameter of the minimum circumscribed circle surrounding the outside of the (Fe,Co) phase exceeds 30 μm is 0.SELECTED DRAWING: Figure 1

Various apparatus, systems, methods, and media are disclosed to provide a thermally assisted magnetic recording (HAMR) media having a small recording grain size with a high aspect ratio. An example magnetic recording medium includes: a substrate; the radiating fin layer is positioned on the substrate; the cushion layer comprises MgO (magnesium oxide)-TiO (titanium oxide) and is positioned on the radiating fin layer; the interface layer comprises TiN and is positioned on the cushion layer; a first nucleation layer on the interfacial layer and comprising FePt-Ag-X, where X is an oxide; a second nucleation layer on the first nucleation layer and comprising FePt-Ag-Y, where Y is an oxide or a nitride; and a magnetic recording layer on the second nucleating layer. In another example, the TiN is formed as part of the cushion layer rather than in the interface layer.

Embodiments of the present invention relate to a co-sputtering rare earth rotating target material, and a preparation method and an application method therefor. The co-sputtering rare earth rotating target material comprises two sections of end target tubes arranged at an axial end of the target material, and a plurality of sections of rare earth target tubes and a plurality of sections of co-sputtering target tubes which are arranged between the two sections of end target tubes and with a target material along an axial middle region, wherein the plurality of sections of rare earth target tubes are spaced apart from the plurality of sections of co-sputtering target tubes, and the target tubes are mutually assembled by means of welding; and the co-sputtering target tubes are selected from at least one of aluminum, copper, nickel, iron and praseodymium target tubes, and the end target tubes are non-rare earth target tubes or rare earth target tubes. In the technical solution provided by the embodiments of the present invention, the rare earth target tubes and the aluminum, copper and other co-sputtering element target tubes are combined on the same rotating target material, so that rare earth and co-sputtering elements are both attached to a surface of an NdFeB magnet, and the beneficial technical effects of shortening the grain boundary diffusion time and reducing the diffusion temperature can be achieved while the utilization rate and the sputtering efficiency of the rare earth target material are improved.

The sputtering target contains 0.05 at % or more of Bi, a total content of metal oxides is 10 vol % to 70 vol %, and the balance contains at least Ru.

To provide a glass for a magnetic recording medium substrate having excellent chemical resistance and impact resistance.SOLUTION: A glass for a magnetic recording medium substrate or a glass spacer for a magnetic recording / reproducing device which is an amorphous glass, in which an SiO2 content is 56 mol% or more, an MgO content is 15 mol% or more and 28 mol% or less, an Li2O content is 0.2 mol% or more, an Na2O content is 5 mol% or less, a total content (Al2O3+MgO+CaO) of Al2O3, MgO and CaO is 29 mol% or more and 36.50 mol% or less, a total content (SiO2+MgO+Li2O+Al2O3+CaO) of SiO2, MgO, Li2O, Al2O3 and CaO is 95.0 mol% or more, a molar ratio [(SiO2+MgO) / Li2O] of a total content of SiO2 and MgO to the Li2O content is 13 or more, and a molar ratio [CaO / (Al2O3+MgO)] of a CaO content to a total content of Al2O3 and MgO is 0.10 or less.SELECTED DRAWING: None

To provide a highly reliable non-magnetic substrate for magnetic recording media. [Solution] A non-magnetic substrate for a magnetic recording medium, which is identified by inspection of the magnetic recording medium 42 as not having a periodic convex shape on its surface, or being below a standard value, wherein the magnetic recording medium has a magnetic layer on the non-magnetic substrate, and in the inspection of the magnetic recording medium by the inspection device 41, the defect portion identified based on the output signal obtained by scanning the surface of the non-magnetic substrate for the magnetic recording medium, which has a magnetic layer formed under heating conditions below a guaranteed temperature, with a thermosensitive resistance element, has a periodic convex shape with a height of 0.1 nm or more and a width of 1 μm or more and a width of 1 μm or more and 15 μm or less.

A sputtering apparatus and a method of manufacturing a magnetic memory device can be provided, the sputtering apparatus including: a chamber; a gas supply source configured to supply a first inert gas and a second inert gas to the chamber, the first inert gas and the second inert gas having first and second evaporation points, respectively, wherein the first evaporation point is higher than the second evaporation point; a plurality of sputtering guns in an upper portion of the chamber; a chuck in a lower portion of the chamber and facing the plurality of sputtering guns, the chuck configured to receive a substrate thereon; and a cooling unit connected to a lower portion of the chuck, the cooling unit configured to cool the chuck to a temperature lower than the first evaporation point and higher than the second evaporation point.

A heater for a disc substrate in a deposition system. The heater has a central first heating zone and an annular second heating zone around the first heating zone. Each of the heating zones has an independently controllable power supply to allow, for example, the second heating zone to be heated to a temperature at least 10° C. greater than the first heating zone.

A magnetic material target comprising one or more of Pt, B, Ti, and Si, one or more of Gd, Ge, Sn, Te, and Hf, and an oxide, with the balance being Co and selectively contained impurities, wherein the total concentration of Co and Pt is 50 at% or more, the total concentration of B, Ti, and Si is 10 at% or more, the concentration of O is 20 at% or more, and the total concentration of Gd, Ge, Sn, Te, and Hf is 1 at% or more.

Provided are: a magnetic recording medium having a high magnetocrystalline anisotropy constant Ku and coercive force Hc; and a sputtering target used to produce this magnetic recording medium.　This Pt-oxide sputtering target is formed from 60 vol% or more but less than 100 vol% of a Pt-based alloy phase and more than 0 vol% but 40 vol% or less of an oxide, the Pt-oxide sputtering target being characterized in that the Pt-based alloy phase contains 50 to 100 at% of Pt.

A sputtering target having: (1) Fe; (2) Pt; (3) one or more elements selected from the group consisting of Ag, Au, B, Co, Cr, Cu, Ga, Ge, Mn, Mo, Nb, Ni, Pd, Re, Rh, Ru, Si, Sn, Ta, W, V, and Zn; in the sputtering target, the atomic ratio of (1) Fe and (2) Pt is 34-55 at%, the total concentration of (1) Fe and (2) Pt is 50 mol% or more, the total content of elements in (3) is 0.5-15 mol%, the remainder of (4) is an oxide, impurities are optionally and selectively included, the volume fraction of the oxide is 40 vol.% or more, and an SEM image having a field-of-view magnification of 3000 is used. And the average particle size of the oxide phase, which is calculated using ImageJ, is 4.0 [mu] m2 or less.