20results about "Coating by sputtering" patented technology

To provide a method for producing a magnetic recording medium capable of having a magnetic layer with high crystal orientation and few defects, a magnetic recording medium, and a magnetic storage device.SOLUTION: A method of producing a magnetic recording medium 1 includes: a step of forming a magnesium oxide underlayer 20 on a surface of a substrate 10 by a sputtering method with using a target containing magnesium oxide; and a step of forming a magnetic layer 30 on the surface side of the magnesium oxide underlayer 20, in which the target containing the magnesium oxide is heated to more than 600°C when forming the magnesium oxide underlayer 20.SELECTED DRAWING: Figure 1

The present invention provides a sputtering apparatus and a thin film manufacturing method that can improve the uniformity of the in-plane film thickness distribution of a thin film formed on a substrate. [Solution] The sputtering apparatus according to the present disclosure is a sputtering apparatus that uses a magnetic field generated from the back side of a target toward a substrate provided opposite the front surface of the target to deposit sputtering particles of the target onto the substrate and form a thin film, comprising: a magnetic field generating unit provided on the back surface of the target; a rotating unit for rotating the magnetic field generating unit; and a cylindrical sputtering adjustment member provided on a central axis between the target and the substrate, connecting a position corresponding to the center of the target and the center of the substrate, wherein the sputtering adjustment member is made of metal and the holes in the sputtering adjustment member are provided to include the central axis.

The present invention relates to a sputtering target for a magnetic recording medium containing Co and Pt as metal components and containing at least one oxide. In the present invention, as an essential oxide for improving magnetic separation, tungsten oxide and / or molybdenum oxide is contained, and the content of the essential oxide is 15 vol% or less. As the oxide in the sputtering target, other oxides such as B2O3 can also be contained as optional oxides, and in this case, the total oxide content is preferably 20 vol% or more and 50 vol% or less. In the present invention, by applying the essential oxide, the total oxide content can be appropriately set while ensuring magnetic separation. According to the present invention, a granular thin film composed of a CoPt-based alloy having good magnetic separation can be formed.

The purpose of the present invention is to provide a magnetic recording medium which stably maintains a state in which a granular magnetic layer forms a granular structure therein, and which improves the surface recording density. The magnetic recording medium has a substrate, an underlayer, a first magnetic layer, and a second magnetic layer in this order, the first magnetic layer including magnetic particles having an L10 structure, and the second magnetic layer including magnetic particles having an L10 structure and having a granular structure including a grain boundary portion of hexagonal boron nitride. The (111) plane of the magnetic particles contained in the first magnetic layer is covered with an alloy of VN, Si3N4, YN, or TiN at the interface with the second magnetic layer, and the magnetic particles contained in the second magnetic layer are epitaxially grown from the (001) plane of the magnetic particles contained in the first magnetic layer. The magnetic particles contained in the first magnetic layer and the magnetic particles contained in the second magnetic layer are each columnar crystals penetrating the first magnetic layer and the second magnetic layer.

The invention provides a sputtering device and a method for manufacturing a thin film, which can improve the uniformity of the in-plane film thickness distribution of the thin film formed on a substrate. The sputtering apparatus according to the present disclosure forms a thin film by attaching sputtering particles of a target to a substrate provided facing the front surface of the target using a magnetic field generated from the back surface side of the target toward the substrate, the sputtering apparatus comprising: a magnetic field generation unit provided on the back surface of the target; a rotating unit that rotates the magnetic field generating unit; and a cylindrical sputtering adjustment member provided on a central axis between the target and the substrate, the central axis connecting the center of the target and a position located at the center of the substrate, the sputtering adjustment member being made of metal, and the hole of the sputtering adjustment member being provided so that the central axis is included.

The present invention provides a magnetic recording medium that stably maintains a state in which a granular magnetic layer forms a granular structure internally, thereby further improving the areal recording density. [Solution] The magnetic recording medium 1 comprises a substrate 10, an underlayer 20, a first magnetic layer 30, and a second magnetic layer 40 in this order. The first magnetic layer contains magnetic particles having an L10 structure, and the second magnetic layer has a granular structure with magnetic particles having an L10 structure and grain boundaries containing hexagonal boron nitride. The (111) plane of the magnetic particles contained in the first magnetic layer is covered with an alloy of VN, Si3N4, YN, or TiN at the interface with the second magnetic layer. The magnetic particles contained in the second magnetic layer are epitaxially grown from the (001) plane of the magnetic particles contained in the first magnetic layer. The magnetic particles contained in the first magnetic layer and the magnetic particles contained in the second magnetic layer are columnar crystals that penetrate the first magnetic layer and the second magnetic layer, respectively.

Provided is a magnetic recording medium that is capable of increasing the reproduction output.A magnetic recording medium is a tape-shaped magnetic recording medium and includes a recording layer. A nucleation magnetic field Hn of the magnetic recording medium satisfies a relationship of Hn≥0 [Oe], and the magnetic recording medium satisfies a relationship of the following formula (1).(Mrt)0.5×f⁡(Hs)≥0.7(1)(wherein, in the formula (1), Mrt represents a product of a residual magnetization amount Mr of the magnetic recording medium and a thickness t of the recording layer. Hs represents a saturation magnetic field of the magnetic recording medium. In a case where Hs≤8500 [Oe], f(Hs)=1.00, and in a case where Hs>8500 [Oe], f(Hs)=1 / (1+(Hs−8500) / 8500).).

The purpose of the present invention is to provide a magnetic recording medium that has excellent running stability even when stored in a high-temperature environment.　The present invention provides a magnetic recording medium in which, when dynamic viscoelasticity measurement is performed on the magnetic recording medium at a frequency of 10 Hz and a heating rate of 2°C / min, the average value A(E") of the loss elastic modulus E" in the temperature range of 60°C to 65°C is 0.06 GPa or less, and the average height Rpk of the protruding peaks measured using a non-contact profilometer using optical interference is 2.4 nm or less.

To provide a manufacturing method of a magnetic recording medium capable of further increasing the recording density by enhancing the perpendicular orientation of a magnetic recording layer, and to provide a magnetic recording and reproducing device equipped with the magnetic recording medium manufactured by the manufacturing method.SOLUTION: A method of manufacturing a magnetic recording medium according to the present invention is a method of manufacturing a magnetic recording medium including, on a non-magnetic substrate, an underlayer, a seed layer, and a magnetic recording layer in this order, wherein the seed layer is formed by forming a film containing two elements of an element α and an element β such that the element α mainly forms a columnar crystal having an fcc structure and the element β mainly forms an amorphous structure, and then etching a surface of the film to form a surface in which the element α and the element β are phase-separated from each other.SELECTED DRAWING: Figure 1

To provide a heating device capable of heating a surface of a workpiece having a disk shape with a hole in the center at high productivity and uniformity, a heating device for heating a workpiece by irradiating workpiece with light includes an irradiating part facing at least one of a pair of main surfaces of workpiece to irradiate workpiece with light. Irradiating part includes plurality of light emitting elements on surface thereof facing the at least one main surface. Surface of the irradiating part facing the workpiece includes first region including a position corresponding to the center of the workpiece, second region surrounding first region from outer side, and third region surrounding second region from outer side and including a position corresponding to the outer periphery of the workpiece. Amount of light emission per unit area in third region is greater than that in each of first and second regions.

To provide FeCo-based alloy and target material each having excellent corrosion resistance and sputtering property.SOLUTION: FeCo-based alloy for a soft magnetic layer includes TCR element and TAM element. The balance is Fe, Co and inevitable impurities. The content (at%) of each element satisfies formula (1) 0.1≤TCR≤10.0, formula (2) 11.0≤TAM≤25.0, formula (3) 16.0≤[TCR / 2+TAM]≤25.0, and formula (4) 0.20≤[Fe / (Fe+Co)]≤0.80. The FeCo-based alloy has microstructure that consisting of (Fe,CO) phases having Fe and / or Co as a main constituent, and intermetallic compound phases including TCR element or TAM element. In this microstructure, the number of (Fe,Co) phases in which the diameter of the minimum circumscribed circle surrounding the outside of the (Fe,Co) phase exceeds 30 μm is 0.SELECTED DRAWING: Figure 1

To provide a highly reliable non-magnetic substrate for magnetic recording media. [Solution] A non-magnetic substrate for a magnetic recording medium, which is identified by inspection of the magnetic recording medium 42 as not having a periodic convex shape on its surface, or being below a standard value, wherein the magnetic recording medium has a magnetic layer on the non-magnetic substrate, and in the inspection of the magnetic recording medium by the inspection device 41, the defect portion identified based on the output signal obtained by scanning the surface of the non-magnetic substrate for the magnetic recording medium, which has a magnetic layer formed under heating conditions below a guaranteed temperature, with a thermosensitive resistance element, has a periodic convex shape with a height of 0.1 nm or more and a width of 1 μm or more and a width of 1 μm or more and 15 μm or less.

A sputtering apparatus and a method of manufacturing a magnetic memory device can be provided, the sputtering apparatus including: a chamber; a gas supply source configured to supply a first inert gas and a second inert gas to the chamber, the first inert gas and the second inert gas having first and second evaporation points, respectively, wherein the first evaporation point is higher than the second evaporation point; a plurality of sputtering guns in an upper portion of the chamber; a chuck in a lower portion of the chamber and facing the plurality of sputtering guns, the chuck configured to receive a substrate thereon; and a cooling unit connected to a lower portion of the chuck, the cooling unit configured to cool the chuck to a temperature lower than the first evaporation point and higher than the second evaporation point.

A magnetic material target comprising one or more of Pt, B, Ti, and Si, one or more of Gd, Ge, Sn, Te, and Hf, and an oxide, with the balance being Co and selectively contained impurities, wherein the total concentration of Co and Pt is 50 at% or more, the total concentration of B, Ti, and Si is 10 at% or more, the concentration of O is 20 at% or more, and the total concentration of Gd, Ge, Sn, Te, and Hf is 1 at% or more.

Provided are: a magnetic recording medium having a high magnetocrystalline anisotropy constant Ku and coercive force Hc; and a sputtering target used to produce this magnetic recording medium.　This Pt-oxide sputtering target is formed from 60 vol% or more but less than 100 vol% of a Pt-based alloy phase and more than 0 vol% but 40 vol% or less of an oxide, the Pt-oxide sputtering target being characterized in that the Pt-based alloy phase contains 50 to 100 at% of Pt.

The present invention provides a sputtering target which enables a magnetic layer of a magnetic recording medium to maintain high coercivity, while being capable of improving magnetic separation between magnetic particles. This sputtering target contains Co and Pt as metal components, while containing NbO2 as a metal oxide component. Alternatively, this sputtering target contains Co and Pt as metal components, while having a phase that contains all of Co, Nb and O.

A magnetic recording medium includes, in a following order, a substrate, an underlayer, a first magnetic layer, and a second magnetic layer, wherein the first magnetic layer includes a magnetic particle having an L10 structure, the second magnetic layer has a granular structure including a magnetic particle having an L10 structure, and a grain boundary including hexagonal boron nitride, a (111) plane of the magnetic particle included in the first magnetic layer is covered with an alloy of VN, Si3N4, YN, or TiN at an interface with the second magnetic layer, the magnetic particle in the second magnetic layer epitaxially grows from a (001) plane of the magnetic particle in the first magnetic layer, and the magnetic particle in the first magnetic layer and the magnetic particle in the second magnetic layer are columnar crystals that penetrate the first magnetic layer and the second magnetic layer, respectively.

To provide a magnetic recording medium in which surface recording density is further improved by stably maintaining a state where a granular structure is formed inside a granular magnetic layer.SOLUTION: A substrate, an underlayer, a first magnetic layer, and a second magnetic layer in this order, the first magnetic layer including magnetic grains having a L10 structure, and the second magnetic layer including magnetic grains having a L10 structure and a granular structure having a grain boundary part containing hexagonal boron nitride, the (111) planes of the magnetic grains included in the first magnetic layer are covered with aluminum nitride at the interface with the second magnetic layer, the magnetic grains included in the second magnetic layer are epitaxially grown from the (001) planes of the magnetic grains included in the first magnetic layer, and the magnetic grains included in the first magnetic layer and the magnetic grains included in the second magnetic layer are columnar crystals penetrating the first magnetic layer and the second magnetic layer, respectively.SELECTED DRAWING: Figure 1

The present invention provides a magnetic material target and a magnetic material target assembly that enable the fabrication of thin films with small Dn (magnetic cluster size) and excellent Hc (coercivity). [Solution] A magnetic material target comprising one or more of Pt and B, Mo, an oxide, with the remainder being Co and selectively included impurities, wherein the combined concentration of Co and Pt is 50 at% or more, the combined concentration of B and Mo is 10 at% or more, and the concentration of O is 20 at% or more.

A sputtering apparatus forms a thin film by depositing sputtered particles of a target on a substrate, using a magnetic field generated from a back surface side of the target toward the substrate provided to face a front surface of the target. The sputtering apparatus has a magnetic field generator provided on the back surface of the target, a rotor configured to rotate the magnetic field generator, and a cylindrical sputter adjustment member provided between the target and the substrate on a center axis connecting a center of the target and a center position of the substrate. The sputter adjustment member is made of a metal, and includes a hole located at a position including the center axis.