Semiconductor-on-diamond devices and associated methods
a technology of semiconductors and diamonds, applied in the direction of semiconductor/solid-state device manufacturing, semiconductor devices, electrical apparatus, etc., can solve the problems of increasing the speed and size of electronic circuits, affecting the cooling effect of such devices, and various thermal problems, so as to improve the thermal properties and methods of making.
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example 1
[0065]A GaN LED crystal is formed on a sapphire substrate. An adynamic diamond film is coated on top of the GaN layer. The adynamic diamond film is deposited by microwave enhanced plasma CVD with methane (1%) and hydrogen (99%) as the gas mixture (100 torr). The adynamic diamond film is then sputter coated with Cr as a reflector and brazed to a silicon support substrate. With such an LED, light generated in the GaN layer is emitted primarily through the sapphire substrate.
example 2
[0066]An adynamic diamond layer is deposited onto a Si wafer as described in Example 1. The adynamic layer is polished to a smooth surface. A thin layer of Si is sputtered onto the adynamic layer. A GaN LED crystal formed on a sapphire substrate is wafer bonded to the thin layer of Si. Light generated in the GaN layer is thus emitted primarily through the sapphire substrate.
example 3
[0067]An adynamic diamond layer is deposited onto a Si wafer as described in Example 1. The adynamic layer is polished to a smooth surface. A thin layer of Si is sputtered onto the adynamic layer. A GaN LED crystal formed on a sapphire substrate is wafer bonded to the thin layer of Si using a gold-tin alloy to form a reflector to more effectively direct light generated in the GaN layer through the sapphire substrate.
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