Offset electrode TFT structure

a technology of offset electrodes and transistors, which is applied in the direction of transistors, electrical devices, semiconductor devices, etc., can solve the problems of limited channel width and length of the channel material of the off-current driven through the source and drain electrodes of the tft, and achieve the effect of reducing the size of the channel

Inactive Publication Date: 2014-05-29
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This design achieves lower off-current and more stable threshold voltage, enabling higher on-current with reduced channel length and minimizing charge trapping issues, making it suitable for high-definition displays and OLED applications.

Problems solved by technology

Unfortunately, the on and off-current driven through source and drain electrodes of the TFT is limited by its channel material as well as the channel width and length.

Method used

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  • Offset electrode TFT structure
  • Offset electrode TFT structure
  • Offset electrode TFT structure

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Embodiment Construction

[0019]The present invention generally relates to an offset electrode TFT and a method of its manufacture. The offset electrode TFT is a TFT in which one electrode, either the source or the drain, surrounds the other electrode. The gate electrode continues to be below both the source and the drain electrodes. By redesigning the TFT, less off-current from the source to the drain electrode is achieved when the gate voltage sets at an off voltage as compared to traditional bottom gate TFTs or top gate TFTs. It will also make the threshold voltage of the gate electrode, at which TFT starts to turns on or off, less sensitive of the change of active layer, dielectric layer and their interfaces. The offset electrode TFT structure is applicable not only to silicon based TFTs, but also to transparent TFTs that include metal oxides such as zinc oxide or IGZO and metal oxynitrides such as ZnON.

[0020]Current TFTs have a gate electrode, a gate dielectric layer, a semiconductor channel, a source e...

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Abstract

The present invention generally relates to an offset electrode TFT and a method of its manufacture. The offset electrode TFT is a TFT in which one electrode, either the source or the drain, surrounds the other electrode. The gate electrode continues to be below both the source and the drain electrodes. By redesigning the TFT, less voltage is necessary to transfer the voltage from the source to the drain electrode as compared to traditional bottom gate TFTs or top gate TFTs. The offset electrode TFT structure is applicable not only to silicon based TFTs, but also to transparent TFTs that include metal oxides such as zinc oxide or IGZO and metal oxynitrides such as ZnON.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application is a continuation of U.S. patent application Ser. No. 13 / 289,033 (APPM / 15544), filed Nov. 4, 2011, which claims benefit of U.S. Provisional Patent Application Ser. No. 61 / 448,429 (APPM / 15544L), filed Mar. 2, 2011, which is herein incorporated by reference.GOVERNMENT RIGHTS IN THIS INVENTION[0002]This Invention was made with Government support under Agreement No. DAAD19-02-3-0001 awarded by ARL. The Government has certain rights in this Invention.BACKGROUND OF THE INVENTION[0003]1. Field of the Invention[0004]Embodiments of the present invention generally relate to a thin film transistor (TFT) and a method of its manufacture.[0005]2. Description of the Related Art[0006]Current interest in TFT arrays is particularly high because these devices may be used in liquid crystal active matrix displays (LCDs) of the kind often employee for computer and television flat panels. The LCDs may also contain light emitting diodes (LEDs), ...

Claims

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Application Information

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Patent Type & AuthorityApplications(United States)
IPC IPC(8): H01L29/786H01L29/66H10K99/00
CPCH01L29/66742H01L29/7869H01L29/41733H01L29/42384H01L29/66969H01L29/78618H01L29/78642
InventorYE, YAN
OwnerAPPLIED MATERIALS INC