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Method for producing multilayer ceramic substrate

a multi-layer ceramic and substrate technology, applied in the direction of water-setting substance layered product, transportation and packaging, chemistry apparatus and processes, etc., can solve the problems of large-scale cosub>2 /sub>laser irradiation apparatus, substrate breakage, and high cost, so as to achieve accurate and easy production of multi-layer ceramic substrates

Active Publication Date: 2012-01-31
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides a method for producing a multilayer ceramic substrate that can be easily and accurately divided. The method involves forming a green ceramic laminate with a plurality of stacked green ceramic layers, and then firing the laminate to sinter the layers. The resulting sintered ceramic laminate has a cavity formed at the boundary-defining thick-film pattern, which can be easily and accurately divided. The method also includes using a shrinkage inhibiting layer to prevent shrinkage and a conductive pattern for forming an embedded element in the ceramic layers. The technical effects of this invention include improved accuracy and efficiency in the production of multilayer ceramic substrates.

Problems solved by technology

In Japanese Unexamined Utility Model Registration Application Publication No. 4-38071, however, an expensive, large-scale CO2 laser irradiation apparatus is required.
The laser irradiation requires a long time.
During cutting, the substrates may be broken by thermal strain, and deformation and / or alteration due to the heat of the laser may occur in sections of the substrate.
In the method disclosed in Japanese Unexamined Patent Application Publication No. 5-75262, in the press-bonded sheets after the formation of the dividing grooves, failures, such as deformation and breakage, may occur due to the dividing grooves during handling of the press-bonded sheets.
When the heat-treated substrate is bent, the substrate may be broken at undesirable locations other than the grooves, resulting in defective articles.
Although the substrate is separated along the dividing grooves, edges may have irregular shapes, resulting in out-of-specification products.

Method used

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  • Method for producing multilayer ceramic substrate
  • Method for producing multilayer ceramic substrate
  • Method for producing multilayer ceramic substrate

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first preferred embodiment

[0042]A method for producing a multilayer ceramic substrate according to a first preferred embodiment will be described below with reference to FIGS. 1A to 4.

[0043]A brief outline of the method for producing a multilayer ceramic substrate will be described below with reference to FIGS. 1A to 1C which are cross-sectional views.

[0044]As shown in FIG. 1A, shrinkage inhibiting green sheets 20 and 22 in close contact with both surfaces of a green ceramic laminate 12a including portions to be formed into a plurality of multilayer ceramic substrates are fired.

[0045]The green ceramic laminate 12a includes in-plane conductive patterns 14 to be formed into internal electrodes, internal leads, embedded elements, and other circuit components in the multilayer ceramic substrates, the in-plane conductive patterns 14 being arranged between a plurality of stacked ceramic green sheets 13; and boundary-defining conductive patterns 16 arranged along boundaries between the multilayer ceramic substrates...

second preferred embodiment

[0082]The ceramic laminate is separated at an edge through one of the cavities formed at both edges of each boundary-defining conductive pattern. To form the edge more accurately, as shown in FIG. 5, the locations and widths of the boundary-defining conductive patterns 16p, 16q, 16r, and 16s may be changed such that sides 17p, 17q, 17r, and 17s of individual boundary-defining conductive patterns 16p, 16q, 16r, and 16s are aligned along the boundaries of the multilayer ceramic substrates. Thereby, the ceramic laminate after firing can be separated at edge 11s passing through the cavities 18 formed at the sides 17p, 17q, 17r, and 17s aligned in the stacking direction of the boundary-defining conductive patterns 16p, 16q, 16r, and 16s.

[0083]The boundary-defining conductive patterns may also be arranged on both sides of the break edge. Alternatively, the boundary-defining conductive patterns may overlap the in-plane conductive patterns.

third preferred embodiment

[0084]As shown in FIG. 6, boundary-defining conductive pattern segments 16s and 16t may be discontinuously formed.

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Abstract

In a method for producing a multilayer ceramic substrate, a green ceramic laminate includes green conductive patterns arranged on a plurality of ceramic green sheets and portions to be formed into a plurality of multilayer ceramic substrates. Boundary-defining conductive patterns are arranged on the ceramic green sheets and along boundaries of the multilayer ceramic substrates. The boundary-defining conductive patterns have firing shrinkage characteristics that are different from those of the ceramic green sheets. During firing of the green ceramic laminate, cavities adjacent to edges of the boundary-defining conductive patterns are formed. A sintered ceramic laminate is divided at edges passing through the cavities.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a method for producing a multilayer ceramic substrate. In particular, the present invention relates to a method for producing a multilayer ceramic substrate including a plurality of stacked ceramic layers.[0003]2. Description of the Related Art[0004]Multilayer ceramic substrates including a plurality of stacked ceramic layers can be efficiently produced by simultaneously firing a source substrate including a plurality of multilayer ceramic substrates and cutting the source substrate into individual multilayer ceramic substrates after firing.[0005]For example, Japanese Unexamined Utility Model Registration Application Publication No. 4-38071 discloses that ceramic green sheets having dividing lines are transferred and laminated to form a laminate, dividing grooves are formed by, for example, irradiating the dividing lines with a CO2 laser after the laminate is subjected to heat treatment,...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): C03B29/00B32B3/14B32B13/04
CPCH01L21/4807H05K3/0052H05K1/0272H05K1/0306H05K3/4614H05K3/4629H05K2201/0909H05K2201/09163H05K2201/09781Y10T428/166H05K3/46
Inventor KAWAMURA, AKIYOSHITSUKIZAWA, TAKAYUKIIKEDA, TETSUYA
Owner MURATA MFG CO LTD