The present invention relates to a method for manufacturing a multilayer
ceramic substrate having a cooling
system, which includes a preparation operation of preparing a plurality of
ceramic sheets formed by
sintering ceramic green sheets, wherein the plurality of ceramic sheets include a first ceramic sheet and a second ceramic sheet; a via hole forming operation of forming a via hole in the ceramic sheets; a via
electrode forming operation of forming a via
electrode in the via hole; a pattern
electrode forming operation of forming a pattern electrode on one surface of the ceramic sheets; a bonding layer forming operation of forming a bonding layer by
coating one surface of the ceramic sheets with a bonding agent; a cover part
processing operation of bonding and laminating a plurality of first ceramic sheets to each other,
processing the first ceramic sheets, and forming an inlet into which a fluid is introduced and an outlet through which the fluid is discharged; an
accommodation part
processing operation of bonding and laminating a plurality of second ceramic sheets to each other, processing the second ceramic sheets, and forming a fluid
accommodation space; and a bonding operation of bonding the laminated first ceramic sheets and the laminated second ceramic sheets to each other.According to the present invention, since an
interposer provided with a processing
chip and / or a
memory chip is installed in a fluid
accommodation space formed inside the multilayer
ceramic substrate, the corresponding
chip can be effectively cooled, and heat generated from the corresponding
chip can be prevented from being transferred to the multilayer
ceramic substrate.