The invention provides a hot-piercing manufacturing method of a micro-via array biological
chip. The hot-piercing manufacturing method comprises the following steps: photoetching, thus obtaining a
photoresist pattern; plating a
metal layer on the
photoresist pattern by using a
chemical deposition method;
electroforming and demolding, thus obtaining an original die blank; electrolyzing, thus obtaining a die; piercing a high molecular material through the die by using a
hot stamping method, cooling and demolding, thus obtaining the micro-via array biological
chip. According to the hot-piercing manufacturing method provided by the invention, the
hot stamping method is adopted, devices can be easily obtained, and the requirements on an implementation environment are low; meanwhile, both the
pore diameter periodicity and the size uniformity are good, and the detection accuracy is high; through the methods of die manufacturing and hot-piercing
copying, controllable manufacturing of the micro-via array biological
chip made from the high molecular material is realized, the
machining steps are greatly simplified, the
machining efficiency is high, the technological cost and the material cost are lower, and the hot-piercing manufacturing method is beneficial for manufacturing a high-density pore array, so that the detection efficiency is further increased, and the hot-piercing manufacturing method is very suitable for large-scale industrial production.