Composite processing technology of fine injection type hole
A compound processing and jet-type technology, which is applied in the field of compound processing of micro-spray holes, can solve the problems of poor shape accuracy and surface roughness, difficult precision control of dimensional accuracy, and difficult processing of complex shapes, so as to achieve small deformation and wear , Good consistency, good practical effect
Inactive Publication Date: 2007-11-07
TSINGHUA UNIV
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Problems solved by technology
[0003] The use of precision machining to manufacture micro-sized holes has disadvantages such as difficult to guarantee machining accuracy, low machining efficiency, and difficult machining of complex shapes; in special machining, electron beam and ion beam machining need to be carried out under vacuum conditions, and the processing equipment is expensive. There are limitations in practical applications; laser processing usually has poor shape accuracy and surface roughness; the processing efficiency of EDM is low, and the loss of electrodes will affect the processing accuracy; electrochemical processing has the ability to achieve precision and micromachining in the processing mechanism. However, the traditional electrochemical processing includes photolithography and electrolytic processing, and the dimensional accuracy is not easy to control precisely in the process of electrolytic etching; while in the aspect of plastic deformation processing, precision stamping has the advantages of high productivity and good consistency of processing dimensions. However, the application of microstructure processing has yet to solve the key process problems
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[0026] The invention provides a compound processing technology for micro-spray holes, which is composed of micro-plastic deformation stamping processing and micro-electric discharge machining. Its combined processing process is as follows: (1) A series of punches 1 with different tip shapes and sizes are used. Firstly, according to the principle of rough machining first and then fine machining, multiple micro-stamping processes are performed to process strips on one side of the workpiece 2. There is a bottom cavity 4 with a fine inverted cone, and there is still a thin layer of metal with a thickness of less than 0.1mm at the bottom of the cavity (as shown in Figure 1(a)); (2) Then turn the workpiece 2 over, and use micro-EDM on its back The electrode 3 faces the position of the inverted cone of the bottom cavity 4 (as shown in Figure 1(b) and Figure 1(c)), and the workpiece 2 is thinned by using a micro-electric discharge process to expose the cone of the bottom cavity 4. At ...
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Abstract
Description
technical field [0001] The invention belongs to the technical field of micromachining, and in particular relates to a compound machining process for micro-jet-shaped holes for processing metal alloy materials by cross-merging micro-stamping and micro-electric discharge machining technologies. Background technique [0002] Micro-sized pores of metal alloy materials are widely used in many fields. For example, printer inkjet hole array, screen structure, spinneret and MEMS (micro electromechanical system) micro-jet, micro-pump and other fine structures. At present, the processing methods of array micro-holes involve precision machining, special processing and micro-processing. [0003] The use of precision machining to manufacture micro-sized holes has disadvantages such as difficult to guarantee machining accuracy, low machining efficiency, and difficult machining of complex shapes; in special machining, electron beam and ion beam machining need to be carried out under vacuu...
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IPC IPC(8): B23H5/04
Inventor李勇陈旭鹏彭良强贾维溥张虹
OwnerTSINGHUA UNIV