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Excimer gas molecular discharging lamp irradiation device and method for using the same

A technology of gas molecules and irradiation devices, applied in discharge lamps, chemical instruments and methods, circuits, etc., can solve problems such as peeling, contamination of irradiated objects, and intensity reduction

Active Publication Date: 2008-09-24
GS YUASA INT LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the conventional irradiation device with a lighting window like this, since the surface temperature of the glass window is relatively low (about 70°C), the scatter generated from the object to be irradiated during irradiation will adhere to the glass window after contacting it. Or when various chemicals such as organic solvents, acids, and alkalis contained in the atmosphere where the device is installed float in the air after vaporization and atomization, reaction products such as ammonium sulfate will be generated after being irradiated with ultraviolet rays, which will occur on the glass. There are problems such as white powder on the window
In this way, when the flying matter or white powder adheres to the lighting window, the intensity of ultraviolet rays is reduced due to the obstruction of the excimer light transmission, or the accumulation of scattered matter, white powder, etc. will peel off and pollute the irradiated object.

Method used

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  • Excimer gas molecular discharging lamp irradiation device and method for using the same
  • Excimer gas molecular discharging lamp irradiation device and method for using the same
  • Excimer gas molecular discharging lamp irradiation device and method for using the same

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Embodiment Construction

[0023] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0024] figure 1 Shown is a cross-sectional view of an embodiment of an excited gas molecular discharge lamp related to the present invention. exist figure 1 Among them, 1 represents the excitatory gas molecular discharge lamp, the luminous tube 3 is made of transparent quartz glass, the cross-sectional shape is a square shape, and the thickness of the quartz is 2 mm, which is basically a cuboid. Then, both ends in the long-axis direction are plugged and sealed, and a gas (for example, xenon gas) that generates excimers when the excited gas molecular discharge lamp is turned on is sealed in the container 4 at an appropriate pressure.

[0025] On one side of the arc tube 3, the electrode 2 made of a metal thin film of nickel is formed by vacuum plating. As a material of the metal thin film, chromium can be used in addition to nickel. Also, an electrode 2' made of a ...

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Abstract

In an excimer lamp irradiation device, an excimer lamp is arranged in a lamp house. Excimer light irradiated from the excimer lamp irradiates an object to be irradiated without passing through a glass window. The surface temperature of the excimer lamp is 100 DEG C or higher.

Description

technical field [0001] The present invention relates to an improvement of an excitation type gas molecule discharge lamp irradiation device using an excitation type gas molecule discharge lamp which emits ultraviolet rays which can be used in photochemical reactions. Background technique [0002] Cleaning technology using ultraviolet irradiation devices using ultraviolet light sources has been known for a long time, and light cleaning has been used in the fields of liquid crystals and semiconductors. As such an ultraviolet ray irradiation device, there is a discharge lamp having a substantially cylindrical shape housed in a lamp house provided with a lighting window and filled with nitrogen gas. For example, Japanese Patent No. 2854255 describes an ultraviolet irradiation device using a dielectric interface discharge lamp. [0003] Figure 5 It is a diagram showing the structure shown in this Japanese Patent No. 2854255, and cylindrical dielectric interface discharge lamps ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01J19/12H01J65/00
CPCB01J19/123B01J19/12H01J65/00
Inventor 细谷浩二坂元弘实
Owner GS YUASA INT LTD
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