Acceleration switch sensor with adjustable threshold value of silicon base band locking function and manufacturing method thereof

Abstract

The invention relates to silicon-based adjustable threshold acceleration switch sensor with lock-up function and a manufacturing method thereof. The switch sensor is characterized by consisting of an anchorage zone and a silicon frame which are arranged at an insulation substrate, a low resistance silicon cantilever with a singe end fixed in the anchorage zone, a metal electrostatic drive conductive fixed polar plate at the insulation substrate, an insulation medium layer on the lower surface of the cantilever, a metal contact electrode on the medium layer, a fixed metal contact electrode anda signal drive / detection loop. The drive voltage and threshold acceleration of the sensor provided have certain relationship and the sensor provided has the lock-up function. The signal output mode of the working state of the sensor is detected by the on-and-off of a metal bridge circuit, which ensures that the acceleration switch sensor produced by utilizing MEMS has the advantages of simple structure, small volume, low energy consumption, low on-resistance, convenient interface circuit and good input and output insulation performance, etc.

Description

technical field [0001] The invention relates to a threshold-adjustable acceleration switch sensor with locking function and a manufacturing method thereof, more precisely, a silicon-based micromachine (MEMS) designed based on the principle of electromechanical coupling and having an adjustable threshold and locking function An acceleration switch, in particular relates to an integrated electronic acceleration threshold switch. Background technique [0002] Generally, accelerometers use a proof mass or vibrating mass to measure acceleration. The external acceleration acts on the mass, and then by measuring the displacement of the mass, the force of the mass on the frame, or the force required to maintain its position (for the latter, that is, an active accelerometer, a closed-loop control system is required ) to get the acceleration value. Acceleration can be measured directly or indirectly from the force or displacement acting on the mass m. However, there are various met...

AI Technical Summary

Problems solved by technology

However, this kind of switch has strict requirements on process tolerances, low precision, and the threshold range is limited to low-frequency signals or slowly changing acceleration ranges. The measurement ability and environmental adaptability are weak, and it is easy to cause switch failure or misoperation.

Moreover, due to the single measurement threshold of this type of switch, it is difficult to realize intelligent integration and other shortcomings.

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