Acceleration switch sensor with adjustable threshold value of silicon base band locking function and manufacturing method thereof

A technology of acceleration switch and sensor, which is applied in the direction of measuring acceleration, speed/acceleration/shock measurement, instruments, etc., and can solve problems such as strict process tolerance requirements, single measurement threshold, and difficulty in realizing intelligent integration

Active Publication Date: 2008-11-12
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
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Problems solved by technology

However, this kind of switch has strict requirements on process tolerances, low precision, and the threshold range is limited to low-frequency signals or slowly changing acceleration ranges. The measurement ability and environmen

Method used

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  • Acceleration switch sensor with adjustable threshold value of silicon base band locking function and manufacturing method thereof
  • Acceleration switch sensor with adjustable threshold value of silicon base band locking function and manufacturing method thereof
  • Acceleration switch sensor with adjustable threshold value of silicon base band locking function and manufacturing method thereof

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Embodiment Construction

[0039] The technological process of the silicon-based shock acceleration threshold switch as described in the summary of the invention is as follows:

[0040] a. At a resistivity of 0.001Ωcm 2 A 5um silicon well is etched on the front side of the SOI silicon wafer as an active gap for the movable structure, such as Figure 4 as shown in .a;

[0041] b. Form a cantilever beam structure in the silicon well of step a, and stop at the SOI buried layer, such as Figure 4 .b shown;

[0042] c. Deposit a dielectric insulating layer on the front of the cantilever beam as a dielectric insulating layer when the switch is closed, then deposit a metal layer on the insulating layer at the end of the beam to form a contact electrode, and deposit a metal layer on the glass to form a drive plate, Fixed contact electrodes as well as chip traces, such as Figure 4 .b shown;

[0043] d. Align and bond the silicon wafer and the glass wafer in step c, such as Figure 4 as shown in .c;

[00...

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Abstract

The invention relates to silicon-based adjustable threshold acceleration switch sensor with lock-up function and a manufacturing method thereof. The switch sensor is characterized by consisting of an anchorage zone and a silicon frame which are arranged at an insulation substrate, a low resistance silicon cantilever with a singe end fixed in the anchorage zone, a metal electrostatic drive conductive fixed polar plate at the insulation substrate, an insulation medium layer on the lower surface of the cantilever, a metal contact electrode on the medium layer, a fixed metal contact electrode and a signal drive/detection loop. The drive voltage and threshold acceleration of the sensor provided have certain relationship and the sensor provided has the lock-up function. The signal output mode of the working state of the sensor is detected by the on-and-off of a metal bridge circuit, which ensures that the acceleration switch sensor produced by utilizing MEMS has the advantages of simple structure, small volume, low energy consumption, low on-resistance, convenient interface circuit and good input and output insulation performance, etc.

Description

technical field [0001] The invention relates to a threshold-adjustable acceleration switch sensor with locking function and a manufacturing method thereof, more precisely, a silicon-based micromachine (MEMS) designed based on the principle of electromechanical coupling and having an adjustable threshold and locking function An acceleration switch, in particular relates to an integrated electronic acceleration threshold switch. Background technique [0002] Generally, accelerometers use a proof mass or vibrating mass to measure acceleration. The external acceleration acts on the mass, and then by measuring the displacement of the mass, the force of the mass on the frame, or the force required to maintain its position (for the latter, that is, an active accelerometer, a closed-loop control system is required ) to get the acceleration value. Acceleration can be measured directly or indirectly from the force or displacement acting on the mass m. However, there are various met...

Claims

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Application Information

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IPC IPC(8): G01P15/135
Inventor 李昕欣贾孟军王跃林
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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