Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Gas controller, its protection device and method

A protection device and controller technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as easy damage of gas controllers, and achieve the effect of extending service life, alleviating gas condensation problems, and long service life

Inactive Publication Date: 2008-12-03
SEMICON MFG INT (SHANGHAI) CORP
View PDF1 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The invention provides a gas controller, a protection device and a protection method for the gas controller, so as to improve the phenomenon that the gas controller is easily damaged due to condensation of gas

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Gas controller, its protection device and method
  • Gas controller, its protection device and method
  • Gas controller, its protection device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0042]In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0043] The device and method of the present invention can be widely used in various fields, and can utilize many suitable materials to make, and the following is to illustrate by specific embodiment, certainly the present invention is not limited to this specific embodiment, this field Common replacements known to those skilled in the art undoubtedly fall within the protection scope of the present invention.

[0044] Secondly, the present invention is described in detail using schematic diagrams. When describing the embodiments of the present invention in detail, for the convenience of explanation, the schematic diagram showing the structure of the device will not be partially enlarged according to the general scale, which should not be ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a gas controller, comprising a control head, a control rod and a control body, in addition, the gas controller further comprises a shell body, the shell body is provided with a first opening at one end which is near to the control rod, part of the control body is arranged in the shell body by the first opening; the shell body is provided with a second opening, a gas path in the control body is connected with the exterior by the second opening; the shell body is further provided with a gas inlet which fills auxiliary gases into the shell body and a gas outlet which exhausts the auxiliary gases in the shell body. The gas controller of the invention can effectively avoid the phenomenon of easy occurrence of gas liquefaction when the liquefied gas passes through the gas controller, thus having the advantages of difficult damage and longer service life. In addition, the invention further discloses a protection device of the corresponding gas controller and a protection method of the gas controller, thus strengthening the protection of the gas controller and prolonging the service life of the gas controller.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a gas controller, a protection device and a protection method for the gas controller. Background technique [0002] In the semiconductor manufacturing process, various high-purity gases, such as nitrogen, hydride gas, halide gas, etc., need to be provided to processing equipment that completes various semiconductor processes, such as deposition equipment, etching equipment, ion implantation equipment, diffusion equipment Wait. These high-purity gases are stored in gas tanks. Due to toxicity and safety considerations, they need to be stored and handled carefully. For this reason, special gas cabinets are usually set up outside the process room, and special gas transmission is used. The system centrally controls and distributes various high-purity gases. [0003] figure 1 Schematic diagrams for existing gas delivery systems, such as figure 1 As shown, each g...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00
Inventor 吴卫卫于永航
Owner SEMICON MFG INT (SHANGHAI) CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com