Method and system for preparing high vacuum field modulation organic small molecular orientation nano film
A nano-film and preparation system technology, applied in vacuum evaporation plating, ion implantation plating, semiconductor/solid-state device manufacturing, etc.
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[0020] The present invention will be further described in conjunction with accompanying drawings.
[0021] The preparation system of organic small molecule oriented nano-films modulated by high vacuum field, see figure 1 , it includes opening a glass window 7 with a diameter of 10 cm sealed with the cavity in the middle of one side of the high-vacuum evaporation chamber 1, and outside the high-vacuum evaporation chamber, a polarizer 6 that can be adjusted in a direction is fixed next to the glass window. A white light source 5 with adjustable light intensity is placed in front of the polarizer.
[0022] Preparation method 1 of organic small molecule oriented nano-film modulated by high vacuum field:
[0023] Deposition of octahydroxyquinoline aluminum (Alq 3 )A step of:
[0024] Step 1, give Alq 3 The evaporation boat 3 is connected to direct current, and the evaporation rate is 0.1nm / s;
[0025] Step 2, when evaporating, inject a beam of white light into the vacuum cavit...
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Abstract
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