Method of manufacturing a micromechanical part
一种机械部件、部件的技术,应用在这种类型的部件领域,能够解决损坏这种部件、复杂、可微加工材料摩擦性能不足等问题
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[0033] shown in Figure 8 The example of FIG. 1 shows a flowchart of the method generally indicated with reference number 1 . Method 1 mainly comprises 6 steps 3, 5, 7, 9, 11 and 13 for manufacturing a mechanical part 51 whose core is made of a micromachinable material substrate. In fact, micromachinable materials, due to their precision of less than 1 micron, are particularly advantageous for the manufacture of, for example, watch components and advantageously replace the commonly used metallic materials.
[0034] In the description below, the micromachinable material may be a crystalline silicon-based material, such as single crystal silicon; crystalline silica, such as quartz; or crystalline alumina, such as corundum (also known as synthetic sapphire). Obviously, other micromachinable materials are conceivable.
[0035] Step 3 consists of obtaining a substrate 53 made of a micromachinable material similar to, for example, single crystal silicon wafers used in the manufact...
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