Method for measuring inside and outside outline as well as wall thickness of differential confocal targeting trigger-type hollow sphere and device therefor

Abstract

The invention belongs to the field of precise optical measurement, and relates to a method for measuring inside and outside outline as well as wall thickness of a differential confocal targeting trigger-type hollow sphere and a device therefor. The method utilizes a differential confocal 'optic probe' sensor to collimate the inner and the outer surfaces of the hollow sphere, and the collimation is matched with the rotation of a working platform, so that the measurement for the outlines of the inner and the outer surfaces as well as the wall thickness of the whole hollow sphere can be completed. Meanwhile, pupil filter technique can be used for improving the resolution and the sensitivity of a system. The invention provides the method for measuring the outlines of the inner and the outer surfaces as well as the wall thickness of the hollow sphere in a trigger way by utilizing a zero point of a differential confocal response curve for a first time, so that the problem that the outlines of the inner and the outer surfaces as well as the wall thickness of the hollow sphere can not be measured at the same time. The differential confocal 'optic probe' sensor detects light intensity signals, and has the advantages of high accuracy, strong ambient interference resistance capability, not damaging measured objects, etc.

Description

Technical field [0001] The invention belongs to the technical field of optical precision measurement, and can be used for inner and outer contour measurement, shape measurement and wall thickness measurement of transparent or translucent hollow spheres. technical background [0002] Laser inertial confinement nuclear fusion (ICF) is one of the feasible ways to realize controllable thermonuclear fusion, and it has important applications in the fields of energy, national defense, and basic scientific research. The commonly used target pellets in ICF experiments contain D 2 Or the microspheres of thermonuclear fuel such as DT, it is generally believed that the micro-geometric parameters such as the contour of the inner and outer surface of the target pellet and the wall thickness are important factors that cause RT instability. During the acceleration of the implosion, the tiny surface disturbance may expand 100 times or more, causing asymmetrical compression or rupture of the targe...

AI Technical Summary

Problems solved by technology

[0009] The purpose of the present invention is to solve the problem of high-precision non-destructive measurement of geometric parameters such as the inner and outer surface contours, topography and wall thickness of microspheres, and propose a method that uses the zero point of the differential confocal response curve as the trigger point for aiming, and measures the differential confocal The height data of the inner and outer surface contours of the microspheres can be obtained by the position change of the focusing objective lens of the "light probe" sensor

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