Modular heater system
A technology for heaters and resistance heating elements, applied in the direction of heating element shape, pipe heating/cooling, electric heating devices, etc., can solve problems such as increasing inventory space and manufacturing and maintenance costs
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[0039] The following description is merely illustrative in nature and is not intended to limit the invention, its application or its uses.
[0040] refer to Figure 1-3 , shows a heater system, generally designated by the reference numeral 10, consistent with the principles of the present invention. Generally, heater system 10 is designed for use as a heating component in semiconductor processing systems such as gas lines and pumping lines, as described in co-pending U.S. Patent Application No. 11 / 520,130, entitled "Modular Heater System," which Commonly assigned with this application and incorporated by reference in its entirety into this specification. However, it should be understood that the heater system 10 described herein, including its various forms, is not limited to this application, and may be used in any occasion where heating of an object is desired, and thus application to semiconductor processing systems should not be construed as limiting. scope of the invent...
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