Priming processing method and priming processing device

Abstract

The invention provides a priming processing method and priming processing device, which ensures the reliability of the priming processing and further reducing the usage amount of the cleaning fluid. The spray export of the narrow slit nozzle (72) is parallel to the top of the priming roller (14), at the stationary status of the priming roller (14), the narrow slit nozzle (72) ejects constant amount of resist liquid (R). Subsequently, the priming roller (14) start rotating, to wind the resist liquid R on the external circumstance surface of the priming roller (14). Subsequently, the revolution rate of the priming roller (14) is can be improved at one time, the liquid film of the resist liquid (R) can be separated to be divided into a narrow slit nozzle (72) side and a priming roller (14) side, after separating the priming roller (14) maintains rotation, for air drying of the resist liquid film (RM1).

Description

Technical field [0001] The present invention relates to a start-up filling processing method and a start-up filling processing device, which are used to form a liquid film of processing liquid near the discharge port of a slit nozzle for coating processing in a non-rotating method as a pre-coating process ready. Background technique [0002] In the photoetching process in the manufacturing process of flat panel displays (FPD) such as LCDs, non-rotational methods are often used. The non-rotational method is to scan a long slit nozzle with a slit-shaped ejection port. A resist solution is applied on a processing substrate (for example, a glass substrate). [0003] In such a non-rotating method, it is desirable to prevent the non-uniformity of the resist dry film thickness and coating unevenness, and make the resist liquid sprayed onto the substrate during the coating scan scan The meniscus formed by winding to the back side of the slit nozzle in the direction of the nozzle is align...

AI Technical Summary

Problems solved by technology

In addition, in the conventional priming treatment device, each time the priming process is performed, as a post-processing, the priming roller is continuously rotated as described above, and the cleaning solution is sprayed on the entire outer peripheral surface (whole circumference) of the priming roller. , so there is this problem of using a lot of cleaning fluid (usually thinner)

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