Novel microplasma device containing floating electrode

A technology of micro-plasma and floating electrodes, which is applied in floating electrodes, AC plasma display panels, gas discharge electrodes, etc., to achieve the effects of fewer process steps, simple structural design, and easy production
CN102082059BInactive Publication Date: 2012-11-28XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XI AN JIAOTONG UNIV
Publication Date
2012-11-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a novel microplasma device containing a floating electrode. An aluminum foil is adopted in the device as a material base; dense array micro-cavities are arranged on the aluminum foil; the inner part of each micro-cavity is provided with an alumina layer as a medium layer so that a basic Al / Al2O3 / Al coplanar electrode structure can be formed; both ends of each micro-cavity are relatively larger than the middle part in size; alumina exists only between both ends of each micro-cavity; pure aluminum remains between adjacent micro-cavities as the floating electrode so that an integral micro-cavity array is formed; simultaneously the two partial aluminum foil bases insulated at the upper and the lower sides of each micro-cavity are used as the electrodes of the device; after the upper and the lower electrodes are guided out, the whole base is sealed and vacuumized with glass so as to obtain the final novel microplasma device containing the floating electrode. The device is simple in structure and convenient to manufacture, can reduce the minimum sustaining voltage of discharging, and the luminescent efficiency is improved.
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Description

technical field

[0001] The invention relates to a micro-plasma device with a coplanar electrode structure. The structure contains a floating electrode, which greatly improves the overall performance of the device. Background technique

[0002] Microcavity Plasma Devices (MPD) are characterized by small microcavity size and high discharge pressure. It is precisely because of these two characteristics that MPD has many unique discharge characteristics, which has become one of the main research hotspots.

[0003] Since White first proposed micro-hollow cathode glow discharge in 1959, micro-plasma has made great progress. The original microcavity plasma device was developed from the micro hollow electrode device, so the early micro plasma is usually called hollow electrode discharge.

[0004] There are many structures of microplasma devices, the most commonly used is the metal / dielectric / metal three-layer structure, and many researches on discharge characteristics are based on...

Claims

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