Non-refrigerating thermocouple infrared detector and preparation method thereof

Abstract

The invention discloses a non-refrigerating thermocouple infrared detector and a preparation method thereof. The non-refrigerating thermocouple infrared detector comprises a thin silicon oxide layer, a high-seebeck-coefficient metal layer, a heat-insulating layer with heat insulation function, a black silicon material layer with high infrared radiation absorption and a surface passivated layer, which are arranged in sequence from top to bottom, wherein the thin silicon oxide layer is formed on a silicon substrate through thermal oxidation, the high-seebeck-coefficient metal layer is deposited on the thin silicon oxide layer, aluminum, gold or titanium is applied to the high-seebeck-coefficient metal layer and serves as a clod end of the non-refrigerating thermocouple infrared detector, the heat-insulating layer comprises silicon oxide and silicon nitride which have a heat insulating characteristic or silicon oxide serves as a sacrifice layer to obtain a cavity, the silicon nitride is formed on the silicon oxide, the black silicon material layer with high infrared radiation absorption serves as a hot end of the non-refrigerating thermocouple infrared detector, and a silicon nitride layer serves as the surface passivated layer. According to the invention, the influence of infrared radiation on a cold end metal buried behind the heat insulating layer can be eliminated; therefore the sensitivity of the detector is improved further.

Description

technical field [0001] The invention relates to the technical field of uncooled thermocouple infrared detectors, in particular to an uncooled thermocouple infrared detector utilizing the strong infrared light absorption characteristics and light-to-heat conversion effect of black silicon materials and a preparation method thereof, in particular to an uncooled thermocouple infrared detector utilizing An uncooled thermocouple infrared detector for detecting mid-wave infrared and long-wave infrared radiation with a thermocouple composed of a black silicon material and a metal material with a high Seebeck coefficient (aluminum, gold, etc.) and a preparation method thereof. Background technique [0002] For a long time, using the Seebeck effect of different materials to prepare thermopile infrared detectors has been one of the research hotspots in the field of infrared detection and imaging. [1][2][3] , but so far there has not been a semiconductor material that is compatible wit...

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