Developing solution spraying system and method and substrate product

A technology of spraying system and developer, applied in the direction of photosensitive material processing, etc., can solve the problems of uneven development and uneven developer.

Inactive Publication Date: 2012-08-22
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Embodiments of the present invention provide a developing solution spraying system and method, and a substrate product, which are used to solve the problem in the prior art that the developing solution sprayed onto the substrate is not uniform, resulting in uneven development

Method used

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  • Developing solution spraying system and method and substrate product
  • Developing solution spraying system and method and substrate product
  • Developing solution spraying system and method and substrate product

Examples

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Effect test

Embodiment 1

[0025] Such as figure 2 As shown, it is a schematic structural diagram of the developer spraying system proposed in Embodiment 1 of the present invention, including a spray head 21, a driving device 22, and a fixed machine platform 23 located below the spray head 21, wherein:

[0026] The fixed machine 23 is used to carry the substrate 24, for example, the substrate 24 may be a glass substrate;

[0027] The driving device 22 is used to drive the spray head 21 to go back and forth at a constant speed for a preset number of times between the starting end 241 and the opposite end 242 of the substrate 24;

[0028] The spray head 21 is used for spraying developing solution onto the substrate 24 during the movement.

[0029] The substrate includes a starting end and an opposite end. In Embodiment 1 of the present invention, the end that first enters the spraying area of ​​the shower head 21 is called the starting end, and the other end is called the opposite end.

[0030] Wherein...

Embodiment 2

[0048] Such as Figure 6 As shown, it is a schematic structural diagram of the developer spraying system proposed in Embodiment 2 of the present invention, including the first spray head 61 and the second spray head 62, the conveying device 63 located below the first spray head 61 and the second spray head 62, the driving device 64 and Rotary device 65, wherein:

[0049] The conveying device 63 is used to carry the substrate 66, wherein the conveying device 63 can be a conveyor belt or a set of conveying rollers;

[0050] The driving device 64 is used to drive the conveying device 63 to move at a constant speed at a preset speed, and drive the substrate 66 to pass through the spraying area of ​​the first nozzle 61 along the direction from the starting end 661 to the opposite end 662, wherein the substrate 66 includes a starting end 661 and an opposite end 662. In Embodiment 2 of the present invention, one end that first enters the spraying area of ​​the first shower head 61 i...

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Abstract

The invention discloses a developing solution spraying system and a method and a substrate product. The developing solution spraying system comprises a spray nozzle, a driving device and a fixed machine table positioned under the spray nozzle, wherein the fixed machine table is used for bearing a substrate; the driving device is used for driving the spray nozzle to move back and forth at a constant speed between a start end and an opposite end of the substrate for preset times; and the spray nozzle is used for spraying developing solution towards the substrate in the moving process. According to the technical scheme of the invention, the problem of the prior art that development is not uniform because the developing solution sprayed onto the substrate is not uniform is solved.

Description

technical field [0001] The invention relates to the technical field of liquid crystal display, in particular to a developing solution spraying system and method, and a substrate product. Background technique [0002] At present, in flat panel display (FPD, Flat Panel Display) technology, liquid crystal display (LCD, Liquid Crystal Display) has gradually replaced cathode ray tube display (CRT, Cathode Ray Tube). ), becoming the mainstream display. Among various types of LCDs, Thin Film Transistor-Liquid Crystal Display (TFT-LCD) is a kind of active matrix liquid crystal display. TFT-LCD has excellent performance and is suitable for large-scale automatic production. And the cost of raw materials is low, so it occupies an important position in LCD. [0003] The production of TFT-LCD is roughly divided into three major processes: array, box forming, and module, and the array process is roughly divided into three major processes: film formation, photolithography, and etching. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/30
Inventor 王灿何璇郭炜
Owner BOE TECH GRP CO LTD
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