Method and device for correcting coordinate positions of multiple image sensors

Abstract

The invention discloses a method and a device for correcting coordinate positions of multiple image sensors. The device comprises a photomask on a detection platform, a lower image sensor and an upper image sensor. A translucent pattern is arranged on the photomask. The lower image sensor is enabled to sense the translucent pattern from below the photomask, so as to correct the coordinate position of the lower image sensor. The upper image sensor is enabled to sense the translucent pattern from above the photomask, so as to correct the coordinate position of the upper image sensor. In this way, the coordinate positions of the upper and lower image sensors can be adjusted synchronously.

Description

technical field [0001] The invention provides a method for calibrating the coordinate positions of multiple image sensors, and particularly relates to calibrating the coordinate positions of multiple image sensors of a detection device by using a mask. The invention also provides a detection device with a plurality of image sensors. Background technique [0002] Industrial inspection equipment is usually equipped with an image sensor, such as an image CCD (Charge Coupled Device) sensor, most of which can move vertically, laterally, and vertically on the inspection table of the inspection equipment. And the top surface image of the object to be tested on the detection table can be sensed from top to bottom. [0003] It is known that the above-mentioned image sensor can usually be externally connected to a computer, and the coordinate position of the image sensor can be calculated by the computer, and then the coordinate position of the object to be measured sensed by the ima...

AI Technical Summary

Problems solved by technology

[0004] However, due to the extremely high manufacturing precision of current optoelectronic products, the above-mentioned method of using the mechanical origin to correct the coordinate positions of the image sensors will easily cause the error of each image sensor when correcting the coordinate positions of multiple image sensors. However, the slight error is enough to affect the manufacturing accuracy of optoelectronic products; in addition, the method of obtaining the coordinate position by using the image sensor to sense the single orientation of the object to be measured is obviously It has been difficult to meet the demand for detection precision at the present stage; in addition, although there are existing methods on the market that respectively configure image sensors in multiple directions of an object for sensing, the image sensors operate independently Therefore, the coordinate positions of each image sensor do not have the ability to be mobilized synchronously, and no method for correcting the coordinate positions of the image sensors is proposed

[0005] Moreover, there is another technology on the market that uses a mask to correct the coordinate position of the image sensor in a single orientation of the object, but the image sensor in the single orientation of the object does not have a significant effect on the improvement of detection precision.

Images