Solar cell and diffusion method of solar cell

Abstract

The invention discloses a solar cell and a diffusion method of the solar cell. The method comprises the steps that silicon wafers are placed in a diffusion furnace; the temperature in the diffusion furnace is increased to 750-800 DEG C, including terminal values; a source is fed to the diffusion furnace for phosphorus diffusion; the basic quantity of phosphorus being diffused to the silicon wafers is maximum solid solubility of the phosphorus in the silicon wafers at the current temperature in the diffusion furnace; the temperature in the diffusion furnace is increased to 810-820 DEG C, including the terminal values; the phosphorus is diffused to the interiors of the silicon wafers; the temperature in the diffusion furnace is increased to 840-850 DEG C, including the terminal values; the source is fed in the heating process for temperature changing diffusion; the increased temperature is kept; oxygen is fed for high temperature advancing till the diffusive quantity of the phosphorus in the silicon wafers reaches a target value; and after the interior of the diffusion furnace is cooled, the diffusion furnace is opened and the silicon wafers are taken out. According to a cell plate produced by the method, the concentration of a phosphorus impurity on the surface is low; the thickness of a dead layer is small; the distribution gradient of phosphorus concentration is large; and the conversion efficiency is improved.

Description

technical field

[0001] The invention relates to the technical field of solar cells, more specifically, to a solar cell and a diffusion method thereof. Background technique

[0002] In recent years, the production technology of solar cells has been continuously improved, the production cost has been continuously reduced, and the conversion efficiency has been continuously improved, making the application of photovoltaic power generation increasingly popular and developing rapidly, and gradually becoming an important source of power supply. Solar cells can convert light energy into electrical energy under sunlight irradiation to realize photovoltaic power generation.

[0003] The production process of solar cells is relatively complicated. Simply put, the production process of solar cells mainly includes: texturing, diffusion, etching, coating, printing and sintering. Diffusion to make PN junction is the core of crystalline silicon solar cells and one of the keys to the quali...

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