Microscopic interference detecting device based on synchronous carrier phase shift and detecting method of microscopic interference detecting device

A technology of interference microscopy and detection devices, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of complex data processing and low light utilization rate, and achieve high light utilization rate, simple method, and convenient operation flexible effects

Inactive Publication Date: 2013-03-06
HARBIN ENG UNIV
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Problems solved by technology

[0005] The present invention aims to solve the problems of low light utilization rate and complex data processing in the existing synchronous carrier frequency phase shifting interference microscopy method, and provides an interference microscopic detection device and detection method based on synchronous carrier frequency phase shifting

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  • Microscopic interference detecting device based on synchronous carrier phase shift and detecting method of microscopic interference detecting device
  • Microscopic interference detecting device based on synchronous carrier phase shift and detecting method of microscopic interference detecting device
  • Microscopic interference detecting device based on synchronous carrier phase shift and detecting method of microscopic interference detecting device

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specific Embodiment approach 1

[0042] Specific implementation mode one: the following combination figure 1 Describe this embodiment mode, the interferometric microscopic detection device based on synchronous carrier frequency phase shifting described in this embodiment mode, it comprises light source 1, it also comprises linear polarizer 2, first polarizing beam splitter prism 3, first collimating beam expander system 4. Object to be measured 5, microscope objective lens 6, correction objective lens 7, first reflector 8, second reflector 9, second collimator beam expander system 10, second polarization beam splitter prism 11, λ / 4 wave plate 12 , a rectangular window 13, a first Fourier lens 14, a one-dimensional periodic grating 15, a second Fourier lens 16, a polarizer group 17, an image sensor 18 and a computer 19, wherein λ is the wavelength of light emitted by the light source 1,

[0043]The light beam emitted by the light source 1 enters the first polarizing beam splitter 3 after passing through the li...

specific Embodiment approach 2

[0054] Embodiment 2: This embodiment is a further description of Embodiment 1. The one-dimensional periodic grating 15 is a binary one-dimensional periodic grating, a sine one-dimensional periodic grating or a cosine one-dimensional periodic grating.

specific Embodiment approach 3

[0055] Specific implementation mode three: the following combination figure 2 Describe this embodiment mode, this embodiment mode is a further description of Embodiment 1 or 2, the polarizer group 17 is made up of two polarizers, and the two polarizers form a 1×2 array, and the light transmission axes of the two polarizers 0° and 45° to the x-axis, respectively.

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Abstract

The invention relates to a microscopic interference detecting device based on synchronous carrier phase shift and a detecting method of the microscopic interference detecting device, which belong to the field of optical interference detection and solve the problems that the existing synchronous carrier phase shift interference microscope method is low in light utilization rate and complex in data process. The microscopic interference detecting device comprises an optical source, a linear polarizing film, a first polarization splitting prism, a first collimation and beam expansion system, an object to be detected, a microobjective, a correcting objective, a first mirror, a second mirror, a second collimation and beam expansion system, a second polarization splitting prism, a lambda/4 wave plate, a rectangular window, a first flourier lens, a one-dimensional period optical grating, a second flourier lens, a polarizing film set, an image sensor and a computer. The detecting method comprises the steps that two phase shift interference images are obtained through once exposure collection after a defocused grating splitting technique and a polarization modulating technique are combined, and phase retrieval of an object is achieved by eliminating a zero frequency component in a differential phase reduction method. The microscopic interference detecting device based on the synchronous carrier phase shift and the detecting method of the microscopic interference detecting device, disclosed by the invention, are suitable for shape measurement of small objects.

Description

technical field [0001] The invention relates to an interference microscopic detection device and detection method based on synchronous carrier frequency phase shifting, and belongs to the technical field of optical interference detection. Background technique [0002] Interference microscopy combines interference technology and microscopic magnification technology, which can accurately analyze the three-dimensional shape of objects and the phase information of phase-type objects. It is an ideal method for measuring the three-dimensional shape and phase distribution of tiny objects. [0003] In 2006, the Swiss company Lyncee Tec launched the DHM-1000 digital holographic microscope for the first time, which can be used to measure the three-dimensional shape and phase distribution of tiny objects. However, it is necessary to tilt the reference light to obtain a sufficiently large carrier frequency to separate the zero-frequency component, real image, and conjugate image of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B9/04
Inventor 钟志单明广郝本功刁鸣窦峥张雅彬
Owner HARBIN ENG UNIV
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