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Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method

A synchronous phase-shifting and interference microscopy technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of complex detection data processing process and low measurement accuracy, and achieve strong real-time performance, high measurement resolution, Control effects that can be measured in real time

Inactive Publication Date: 2015-04-15
HARBIN ENG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The present invention aims to solve the problems of complicated process of processing detection data and low measurement accuracy in the existing synchronous phase-shifting interference microscopy detection method, and provides a synchronous phase-shifting common optical path interference microscopy detection based on orthogonal double gratings Device and detection method

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  • Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method
  • Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method
  • Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method

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specific Embodiment approach 1

[0040] Specific implementation mode one: the following combination Figure 1 to Figure 4 Describe this embodiment, the synchronous phase-shifting common optical path interference microscope detection device based on orthogonal double gratings in this embodiment, it includes a light source 1, it also includes a linear polarizer 2, a collimating beam expander system 3, a first beam splitter Prism 4, second dichroic prism 5, first λ / 4 wave plate 6, correction objective lens 7, microscope objective lens 8, object to be measured 9, second λ / 4 wave plate 10, third λ / 4 wave plate 11, Rectangular window 12, first Fourier lens 13, one-dimensional period amplitude grating 14, one-dimensional period phase grating 15, second Fourier lens 16, four-quadrant polarizer group 17, image sensor 18 and computer 19, where λ is the light wavelength of the beam emitted by light source 1,

[0041] The one-dimensional period amplitude grating 14 and the one-dimensional period phase grating 15 form a ...

specific Embodiment approach 2

[0053] Specific embodiment two: this embodiment is a further description of embodiment one, the first dichroic prism 4 and the second dichroic prism 5 are non-polarizing dichroic prisms, the second λ / 4 wave plate 10 and the third λ / 4 wave The direction of the fast axis of sheet 11 is the same.

specific Embodiment approach 3

[0054] Specific Embodiment Three: This embodiment is a further description of Embodiment One. The first dichroic prism 4 and the second dichroic prism 5 are both polarizing dichroic prisms, and the second λ / 4 wave plate 10 and the third λ / 4 wave plate The directions of the fast axes of 11 are perpendicular to each other.

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Abstract

The invention discloses an orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and a detection method, and belongs to the technical field of optical interfering detection. The invention solves problems of complexity in processing process of detection data and low measurement accuracy in existing synchronous phase shifting interference microscopy detection methods. The method integrates the interfering microscopy technology with the orthogonal double grating common-path synchronous phase shifting technology, linear polarization parallel light after collimation and beam expansion is divided into object light and reference light by a first polarized beam splitter prism and a second polarized beam splitter prism to be ultimately converged at a rectangular window side-by-side, a computer obtains an interference figure containing four patterns by collection, and phase distribution of an object to be detected is obtained by calculating according to strength distribution of the four interference patterns. The orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and the detection method are suitable for measurement of three-dimensional shape and phase distribution of micro-objects.

Description

technical field [0001] The invention relates to a synchronous phase-shift common optical path interference microscopic detection device and detection method based on orthogonal double gratings, belonging to the technical field of optical interference detection. Background technique [0002] Interference microscopy combines interference technology and microscopic magnification technology, which can accurately analyze the three-dimensional shape of objects and the phase information of phase-type objects. It is an ideal method for measuring the three-dimensional shape and phase distribution of tiny objects. [0003] In 2006, the Swiss company Lyncee Tec launched the DHM-1000 digital holographic microscope for the first time, which can be used to measure the three-dimensional shape and phase distribution of tiny objects. However, due to the off-axis holographic optical path, the CCD resolution and spatial bandwidth product of the image sensor cannot be fully utilized; at the sa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/04G01B11/26
Inventor 单明广钟志郝本功刁鸣张雅彬窦峥
Owner HARBIN ENG UNIV
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