Abstract
The invention provides a confocal microscopy measuring device based on measured surface fluorescence excitation, and belongs to the technical field of surface topography measurement. The confocal microscopy measuring device comprises a laser device, a collimation beam expander, a polarizing beam splitter, a quarter-wave plate, a detection objective lens, a tested part, a collection objective lens, a pinhole and a detector, wherein the collimation beam expander and the polarizing beam splitter are configured on a collineation light path of the laser device along the light propagation direction; the quarter-wave plate, the detection objective lens and the tested part are configured on the reflection light path of the polarizing beam splitter; the collection objective lens, the pinhole and the detector are configured on the transmission light path of the polarizing beam splitter; a narrow band filter is contained inside the detector; and the tested part is borne by a micrometric displacement objective table, and the surface of the tested part is coated with a film in a vacuum evaporating coating method. By means of the design that surface characteristics of the tested surface are changed through film coating, the fact that measurement light can return back to a detection system after being reflected by the tested surface is guaranteed, the difficult problems of detection of a large numerical aperture (NA) and high gradient surface are resolved, and the confocal microscopy measuring device is suitable for ultra precise measurement of three-dimensional shapes with large NA and high gradient spherical surfaces, aspheric surfaces and free-form surfaces.
Description
technical field
[0001] The confocal microscopic measurement device based on the fluorescent excitation of the measured surface belongs to the field of surface topography measurement technology, and particularly relates to a three-dimensional microstructure, microstep, and microgroove line used in microstructured optical elements, microstructured mechanical elements, and integrated circuit elements. Ultra-precision measuring device for surface shape measurement of wide and large numerical aperture optical components. Background technique
[0002] Confocal sensing technology is a three-dimensional optical microscopy technology suitable for micron and submicron scale measurement. Its core principle is to use the basic characteristics of the significant difference between the out-of-focus signal and the in-focus signal intensity of the optical microscope system. The detector collects sample information to realize the separation of out-of-focus and in-focus signals, so as to ove...
