A method for preparing graphene or ultra-thin carbon film with PVD technology

A graphene, ultra-thin technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve problems such as unfavorable energy saving and environmental protection, small output size, difficult thickness control, etc., to reduce energy and resources. The effect of small consumption, small shape and size requirements, and precise and controllable thickness
CN103266306BActive Publication Date: 2015-11-18YICHANG HOUHUANG VACUUM TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
YICHANG HOUHUANG VACUUM TECH
Publication Date
2015-11-18

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Abstract

The invention provides a method for preparing a graphene or ultrathin carbon film by a PVD (physical vapor deposition) technique, which comprises the following steps: putting a substrate on a substrate rack in a deposition chamber, and carrying out glow cleaning on the substrate surface; introducing an acetylene-argon gas mixture into the gas mixture at 70-100 DEG C in an argon environment under the conditions of vacuum degree 0.5-1 Pa and the substrate voltage bias -200V; opening an anode layer ion source to ionize the gas mixture, wherein the voltage of the anode layer ion source is 300-500V in the ionization process, the acetylene is ionized to generate carbonous cations, and the cations bombards the substrate under the action of an electric field and deposits on the substrate; and after the deposition is finished, annealing under vacuum conditions for 1-2 hours, thereby preparing the graphene or ultrathin carbon film on the substrate surface after the annealing is finished. The method provided by the invention can satisfy the large-scale preparation of uniform-thickness graphene or ultrathin carbon films, and has important industrial application prospects.
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Description

technical field

[0001] The invention relates to a method for preparing graphene or ultra-thin carbon film by PVD technology, belonging to the technical field of film materials. Background technique

[0002] Carbon is an element widely distributed in nature and exists in various forms, such as graphite, amorphous carbon and diamond, as well as carbon nanotubes and graphene discovered in recent years. The properties of different forms of carbon vary greatly, but the reason is that carbon can form several stable hybrid forms, that is, sp 1 hybridization, sp 2 hybridization and sp 3 hybridization. Graphene refers to a single-layer graphite sheet, only one atom thick, composed of sp 2 A honeycomb crystal structure formed by the close arrangement of hybridized carbon atoms. The carbon-carbon bond length in graphene is about 0.142nm. There are three σ bonds in each lattice, which are very firmly connected, forming a stable hexagonal shape. Visually speaking, graphene is a tw...

Claims

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