Time-of-flight mass spectrometer
A mass analysis device and time-of-flight technology, applied in the field of ion incident optical systems, can solve the problems of reliability, time-consuming, troublesome operation, etc., and achieve the effects of easy assembly, reduced angular spread, and easy production
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[0054] Orthogonal acceleration TOFMS according to an embodiment of the present invention will be described with reference to the drawings. figure 2 It is the overall structure diagram of the orthogonal acceleration method TOFMS of the present embodiment, figure 1 It is a schematic configuration diagram (a) of the ion incident optical system in this orthogonal acceleration method TOFMS and its optical equivalent configuration diagrams (b) and (c).
[0055] The orthogonal acceleration method TOFMS of the present embodiment includes: an ion source 1, which ionizes a target sample; a TOF analyzer 5, which is equipped with a reflector 51; Analyzer 5; electrostatic lens 3, which sends ions emitted from ion source 1 into orthogonal acceleration part 4; detector 6, which detects ions flying in the flight space of TOF analyzer 5; data processing part 16 , which processes the data obtained by the detector 6 to make, for example, a mass spectrum, etc.; the electrostatic lens power sup...
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