Micro heater

A micro-heater and micro-channel technology, applied in the field of micro-electromechanical systems, can solve the problems of high price, complex production equipment, uneven heating temperature, etc., and achieve the effect of low cost and simple process

Active Publication Date: 2015-03-25
TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Metals (such as platinum Pt, gold Au, etc.) are usually integrated in the form of a solid film on the chip substrate to form a micro heater by deposition, sputtering and other methods. The thickness of the metal film is often uneven, resulting in uneven heating temperature. question
In order to ensure the uniform thickness of the metal film, expensive production equipment and complex production processes are required, and the implementation method is relatively complicated

Method used

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Embodiment 1

[0027] Such as figure 1 As shown, this embodiment provides a micro heater, including a reaction chamber 1, a sample microchannel 2, the sample microchannel 2 leads to the reaction chamber 1, and at least two arc-shaped microchannels with the same arc;

[0028] The reaction chamber 1 is surrounded by at least two arc-shaped micro-channels with the same radian. direct contact.

[0029] Specifically, an insulating material with low thermal conductivity can be filled between at least two arc-shaped micro-channels, and an insulating material with low thermal conductivity can be filled between at least two arc-shaped micro-channels and the reaction chamber 1 . The reaction chamber 1 is a microenvironment with a constant and uniform temperature, and the sample microchannel 2 is a channel for taking and placing the test substance into the reaction chamber 1 . At least two arc-shaped micro-channels with the same radian can be figure 1 The arc-shaped micro-channel 3 and the arc-shape...

Embodiment 2

[0049] Such as figure 2As shown, this embodiment provides a micro-heater, including a reaction chamber 1, a sample micro-channel 2, an arc-shaped micro-channel 3 and an arc-shaped micro-channel 4 with the same radian, a hollow lead wire 5, and an infusion port 6 , power module 7, temperature control module 8.

[0050] Among them, the reaction chamber 1 is used to provide the constant temperature environment required by the test object; the sample microchannel 2 leads to the reaction chamber 1, and is used to inject and take the test substance into the reaction chamber 1; the arc-shaped micro-channel 3, the arc-shaped The micro-channel 4 is used to provide a heat source to the reaction chamber 1 and / or measure the temperature of the reaction chamber 1; the hollow lead wire 5 is used to connect the arc-shaped micro-channel 3 and the arc-shaped micro-channel 4 to the filling port 6; the filling port 6 is used to pour liquid metal into the arc-shaped micro-channel 3 and the arc-...

Embodiment 3

[0058] Such as image 3 As shown, this embodiment provides a micro-heater, including a reaction chamber 1, a sample micro-channel 2, an arc-shaped micro-channel 3 and an arc-shaped micro-channel 4 with the same radian, a hollow lead wire 5, and an infusion port 6 , power module 7, temperature control module 8.

[0059] Among them, the reaction chamber 1 is used to provide the constant temperature environment required by the test object; the sample microchannel 2 leads to the reaction chamber 1, and is used to inject and take the test substance into the reaction chamber 1; the arc-shaped micro-channel 3, the arc-shaped The micro-channel 4 is used to provide a heat source to the reaction chamber 1 and / or measure the temperature of the reaction chamber 1; the hollow lead wire 5 is used to connect the arc-shaped micro-channel 3 and the arc-shaped micro-channel 4 to the filling port 6; the filling port 6 is used to pour liquid metal into the arc-shaped micro-channel 3 and the arc-...

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Abstract

The invention provides a micro heater, which belongs to the field of micro-electro-mechanical system. The micro heater includes a reaction chamber, a sample micro channel leading to the reaction chamber, and at least two circular-arc micro channels having the same radian. The reaction chamber is surrounded by the at least two circular-arc micro channels having the same radian. The at least two circular-arc micro channels are not directly contacted to each other and to the reaction chamber. Compared with the existing heating method by a metal film which is formed on a chip substrate material, the micro heater in embodiments of the invention is easy to produce and low in cost, and can be used in on-chip cell culture, on-chip protein thermal focusing, on-chip polymerase chain reaction (PCR), and the like.

Description

technical field [0001] The invention relates to the field of micro-electromechanical systems, in particular to a micro heater. Background technique [0002] On-chip resistive heating is an important heating technology in the technical field of MEMS (English full name: Micro-Electro-Mechanical-Systems, Chinese translation: micro-electro-mechanical system), which is a compact structure, good integration and low energy consumption. Embedded heating method. This method usually uses a conductive medium as a micro-heater material to form an easily controllable resistive micro-heater integrated on a chip. [0003] Metal has good electrical and thermal conductivity, and it is widely used in micro heaters. Metals (such as platinum Pt, gold Au, etc.) are usually integrated in the form of a solid film on the chip substrate to form a micro heater by deposition, sputtering and other methods. The thickness of the metal film is often uneven, resulting in uneven heating temperature. ques...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01L3/00
Inventor 高猛桂林
Owner TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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