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46results about How to "Realize the process is simple" patented technology

A LTCC substrate three-dimensional stacking structure and a hermetic packaging method thereof

A LTCC substrate three-dimensional stacking structure and a hermetic packaging method thereof are disclosed. The three-dimensional stacking structure comprises components, first and second LTCC substrates, first, second, third, fourth, fifth and sixth metal film layer, and first and second pads. The hermetic packaging method comprises the following steps of: processing a substrate with a ceramic dummy layer on a stacked assembly surface by a conventional LTCC proces; grinding and leveling the surface of the assembly surface; fabricating metallized pads for solder welding on the assembly surface by a post-firing process; prefusing the solder in the welding area and performing cleaning; assembling the components on the substrate; aligning the stacking assembling surfaces of the substrates with assembled components and performing heating to realize sol bonding; cleaning the weld seam and supplementing the solder; testing the airtightness of the stacked LTCC substrates, and welding the substrates until the substrates are qualified if the airtightness is not up to the standard. The invention can realize the vertical interconnection between the local hermetic package of the substrate and the substrate including the high-frequency signal, and provides a simple and reliable solution for the high-density integration.
Owner:SOUTHWEST CHINA RES INST OF ELECTRONICS EQUIP

Method for forming insulating groove in substrate and semiconductor device

The invention provides a method for forming an insulating groove in a substrate and a semiconductor device. The method comprises the steps as follows: an insulating layer is formed in the region, in which an insulating groove is to be formed, on the surface of a substrate, wherein the insulating layer can be taken as the bottom of the insulating groove, the specific thickness can be correspondingly adjusted according to the device type and the operating requirements, forming of the insulating layer on the surface of the substrate is relatively easy to implement, and the thickness and the region range are relatively easy to control; an epitaxial layer is formed on the substrate, and the structure of the epitaxial layer can be determined according to the type of the semiconductor device; andan opening is formed in the epitaxial layer to expose the insulating layer, thereby forming the insulating groove. Compared with the prior art, the method has the advantages that control on the thickness of the bottom of the insulating layer at the bottom of the groove and improvement of electric field distribution can be implemented, additional equipment or process is not needed for implementation, and the implementation procedure and the implementation process are simple.
Owner:GLOBAL ENERGY INTERCONNECTION RES INST CO LTD +2
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