A Silicon Micromachined Linear Vibration Gyroscope and Its Orthogonal Error Stiffness Correction Method
A technology of silicon micromechanics and linear vibration, which is applied in gyro effect for speed measurement, gyroscope/steering sensing equipment, speed/acceleration/shock measurement, etc. It can solve the problem of demodulation phase angle error, quadrature signal affecting gyroscope performance, etc. problem, achieve the effect of reducing quadrature error, high practical application value, and low power consumption
Active Publication Date: 2018-02-02
SOUTHEAST UNIV
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[0012] At present, the phase-sensitive demodulation method is mostly used to extract the Gothic signal in the detection channel. During the implementation of this method, a certain demodulation phase angle error will be introduced due to the matching error of the circuit component parameters, so that some quadrature signals are extracted by mistake. Gothic signal which in turn affects gyro performance
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[0056] The following describes the method of the present invention with reference to the accompanying drawings and specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and not to limit the scope of the present invention. After reading the present invention, those skilled in the art will understand Various equivalent modifications fall within the scope defined by the appended claims of this application.
[0057] Such as figure 1 As shown, a typical silicon micromachined gyroscope is composed of a structure diagram, including a gyroscope structure 1, a gyroscope measurement and control circuit 2 and a gyroscope package 3, which are used to correct the quadrature error of the silicon micromachined linear vibrating gyroscope. The gyro structure 1 is composed of a driving axial structure 11, a detection axial structure 12, a coupling stiffness module 13 and an orthogonal correction negative stiffness generating mechanism...
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The invention discloses a silicon micro mechanical vibrating gyroscope and an orthoronal error rigidity correction method. The method comprises the following steps: driving a closed loop to excite a driving mode to enable the driving mode to vibrate on a resonant frequency point thereof at a fixed amplitude; extracting a signal in a detection channel, demodulating a driving displacement signal to obtain an orthoronal signal amplitude, comparing the orthoronal signal amplitude with a reference signal, and sending a comparative result into an orthoronal correction controller; outputting a controller output signal to an orthoronal rigidity correction broach in a gyroscope structure via a voltage regulating module, and generating static negative rigidity to correct coupling rigidity generating an orthoronal error. The controller in the invention can automatically adjust the controlled quantity according to different orthoronal coupling rigidity of the target gyroscope structure to completely eliminate the orthoronal coupling rigidity, so as to greatly reduce the influence of a processing error on the performance of the gyroscope. The method disclosed by the invention has the advantages of small volume, easy implementation, high reliability, good temperature performance, capability of being integrated with the gyroscope structure, etc.
Description
Technical field [0001] The invention relates to the field of silicon micromachined gyroscopes, in particular to a silicon micromachined wire vibration gyroscope and a method for correcting its orthogonal error stiffness. Background technique [0002] Silicon micromechanical gyroscope is an inertial measurement sensor processed by MEMS (Micro-Electro-Mechanical System) technology. It uses the Coriolis effect principle to measure carrier angular rate information. It has a small size, low power consumption, It has the advantages of light weight, low cost, strong anti-overload characteristics, easy integration and mass production. At present, it has applications in many fields, such as: inertial navigation, automotive safety, industrial control, consumer electronics, etc. It was first born in the late 1980s. With the continuous development of processing technology and measurement and control technology, the precision of silicon micromachined gyroscopes has gradually improved. At pre...
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IPC IPC(8): G01C19/5733G01C25/00
CPCG01C19/5733G01C25/00
Inventor李宏生曹慧亮倪云舫黄丽斌徐露
OwnerSOUTHEAST UNIV