Biaxial micro-mechanical system transducer structure

A technology of micro-mechanical systems and transducers, applied in the field of micro-mechanical systems, can solve problems affecting measurement accuracy, orthogonality errors, and reduced use area, achieving high integration and small orthogonality errors

Pending Publication Date: 2021-11-02
美新半导体(天津)有限公司
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

With the popularization and popularization of MEMS applications, the corresponding chips are often required to have more powerful computing capabilities and more complex microsystems, which requires MEMS chips to reduce the use area and have higher integration. At the same time, MEMS devices may produce Orthogonality error is introduced by plane rotation, which greatly affects the measurement accuracy

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Biaxial micro-mechanical system transducer structure
  • Biaxial micro-mechanical system transducer structure
  • Biaxial micro-mechanical system transducer structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0013] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0014] Reference herein to "one embodiment" or "an embodiment" refers to a particular feature, structure or characteristic that can be included in at least one implementation of the present invention. "In one embodiment" appearing in different places in this specification does not all refer to the same embodiment, nor is it a separate or selective embodiment that is mutually exclusive with other embodiments. Unless otherwise specified, the words connected, connected, and joined in this document mean that they are electrically connected directly or indirectly.

[0015] In describing the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer" etc. indicate an orie...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a biaxial micro-mechanical system transducer structure. The biaxial micro-mechanical system transducer structure comprises: a fixed substrate; a movable substrate which is suspended above the fixed substrate; first anchoring structures which are arranged on the outer side of the movable substrate; folding beams which are arranged on the outer side of the movable substrate, wherein each folding beam comprises a first folding beam and a second folding beam which are perpendicular and orthogonal to each other, and the first folding beams and the second folding beams are connected with the movable substrate and the corresponding first anchoring structures; second anchoring structures which are arranged on the outer side of the movable substrate; and comb tooth capacitor elements which are arranged between the movable substrate and the second anchoring structures, wherein each comb tooth capacitor element comprises movable comb teeth and fixed comb teeth which are arranged in an interdigital mode, the movable comb teeth are connected with the movable substrate, and the fixed comb teeth are connected with the corresponding second anchoring structures. Compared with the prior art, the invention has the advantages of high integration level and small quadrature error.

Description

【Technical field】 [0001] The invention relates to the technical field of micro-mechanical systems, in particular to a transducer structure of a biaxial micro-mechanical system. 【Background technique】 [0002] Micro-Electro-Mechanical Systems (MEMS) is a micro-nano integrated system that uses integrated circuit (IC) manufacturing technology to manufacture micro-nano sensors, control circuits, communication interfaces and power supplies on one or more chips. , its main function is to provide users with the ability to perceive and manipulate the environment by interacting with the surrounding environment. Because of its small size, high integration, excellent performance and many other advantages, it has been widely used in military equipment, consumer electronics, industrial manufacturing, medical services and other fields. Typical MEMS devices include accelerometers, angular velocity meters, magnetic field sensors, pressure sensors, temperature and humidity sensors, biochemi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & AuthorityApplications(China)
IPC IPC(8): B81B3/00B81B7/02
CPCB81B3/0021B81B3/0062B81B7/02B81B2203/05
Inventor苏云鹏凌方舟蒋乐跃丁希聪
Owner美新半导体(天津)有限公司