Symmetric fully decoupled double-mass silicon microgyroscope based on double-tuning fork effect
A double-mass and silicon micro-gyroscope technology, which is applied in the gyro effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., can solve the problem that the drive and detection modal vibration frequencies cannot be completely consistent, it is difficult to achieve differential detection, Problems such as poor common-mode interference ability, etc., achieve the effect of large capacitance change, large driving amplitude, and strong anti-common-mode error ability
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[0027] The present invention will be further described below in conjunction with drawings and embodiments.
[0028] figure 1 It is a schematic diagram of the planar structure of the micro gyroscope of the present invention. like figure 1 As shown, the present invention provides a micro gyroscope to realize the measurement of the input angular velocity perpendicular to the horizontal plane of the gyroscope mechanical module. The micro gyroscope includes two vertical layers, the upper layer is a mechanical module of the silicon micro gyroscope, and the lower layer is a glass substrate covered with signal leads. The mechanical module 1d of the gyroscope is composed of two identical sub-modules 1a, 1b, both of which are angular velocity measurement units, and are placed horizontally and symmetrically; the two sensitive masses 4a, 4b are coupled by driving a folded beam 2a and 2b establish the correlation of the driving mode, and establish the correlation of the detection mode t...
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