SF6 gas decomposition product analysis device based on Fourier transform
A Fourier transform and gas decomposition technology, which is applied in the field of SF6 gas decomposition product analysis devices, can solve problems such as affecting the detection accuracy of gas and its decomposition products, inability to accurately control the amount of gas, secondary pollution, etc., so as to avoid moisture and The entry of impurities, the avoidance of deviation, the effect of precise control
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[0028] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0029] In the preferred embodiment of the present invention, an SF based on Fourier transform 6 Gas decomposition product analysis device, such as figure 1 As shown, it includes a primary filter 1, a sampling tube 2, a high-efficiency filter 9, a flow adjustment mechanism 3, an FTIR analyzer 4, a first vacuum pump 11, and an exhaust gas collection mechanism 5 connected in sequence;
[0030] The above-mentioned flow regulating mechanism 3 includes a pressure reducing valve 10, a flow regulating valve 6, a flow meter 7, and a pressure gauge 8, which are connected in sequence, wherein the pressure r...
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