High positioning accuracy lenses Interchangeable photoetched objective lens frame
A technology of positioning accuracy and lithography objective lens, applied in optics, optical components, optomechanical equipment, etc., can solve the problems of large operating space, easy contamination of the lens, complex structure, etc., and achieve the effect of high positioning accuracy
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[0028] The embodiments of the present invention will be further described below in conjunction with the drawings.
[0029] See attached figure 1 And figure 2 , The lithographic objective lens frame with replaceable lenses with high positioning accuracy of the present invention includes an outer lens frame 1, an inner lens frame 2 and a protective cover 4;
[0030] See attached image 3 And Figure 4 , The outer mirror frame 1 has a cylindrical structure, and the interior of the outer mirror frame 1 is a square space. The outer mirror frame 1 has an opening opposite to any side wall of the square space, and the square space is perpendicular to the opening. One side wall is provided with a sliding groove 102, one end of the side wall of the square space opposite to the opening is provided with a conical groove 104, and the other end is provided with a V-shaped groove 103. The V-shaped groove 103 and the outer mirror frame 1 The upper end faces are parallel, and the upper end face of...
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