Solar cell and hydrogenated amorphous silicon i membrane surface processing method thereof

Abstract

The invention discloses a silicon heterojunction solar cell and a hydrogenated amorphous-silicon i membrane surface processing method thereof. Plasma treatment is carried out on a hydrogenated amorphous-silicon i membrane surface by using hydrogen-argon mixed gas or hydrogen-helium mixed gas; and thus the hydrogenated amorphous-silicon i membrane surface is cleaned well by using argon or helium plasma in a physical manner and the number of the hydrogen plasma is increased, so that the passivation and cleaning effects for the hydrogenated amorphous-silicon i membrane surface are enhanced. Meanwhile, because the hydrogenated amorphous-silicon i membrane surface is damaged slightly during the physical bombardment process of the argon or helium plasma, the hydrogen plasma is capable of not only realizing a passivation effect on the hydrogenated amorphous-silicon i membrane surface but also repairing the slight damage. On the basis of the synergistic effect of the hydrogen-argon mixed gas or hydrogen-helium mixed gas, the good passivation and cleaning effects for the hydrogenated amorphous-silicon i membrane surface are realized, so that the battery performance is enhanced.

Description

[0001] The application of the present invention is a divisional application of the invention application with the filing date of November 26, 2015, the application number of 201510842967.9, and the invention name of "a solar cell and its hydrogenated amorphous silicon i film surface treatment method". technical field [0002] The invention relates to the technical field of solar cell production, in particular to a silicon heterojunction solar cell and a method for treating the surface of a hydrogenated amorphous silicon i-film layer thereof. Background technique [0003] Silicon heterojunction solar cell is a hybrid cell made of crystalline silicon substrate and amorphous silicon thin film technology. It has the advantages of high conversion efficiency, simple process flow, and low temperature coefficient, and has attracted widespread attention. The production process of existing silicon heterojunction solar cells includes: cleaning, texturing, hydrogenated amorphous silicon ...

AI Technical Summary

Problems solved by technology

[0006] Existing silicon heterojunction solar cells mainly use hydrogen gas to process the deposited hydrogenated amorphous silicon i-film layer with plasma. This treatment method is a chemical reaction-based treatment process, in which hydrogen plasma can Defect states such as unsaturated silicon dangling bonds on the surface of the crystalline silicon i film layer reduce the recombination of the interface to achieve the purpose of passivating the defect states at the interface. Effective cleaning effect, so that pollutants cannot be completely cleaned, thus affecting battery performance

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