The invention provides a
solar cell, a preparation method thereof and a photovoltaic module. The preparation method comprises the following steps that a tunneling
oxide layer, a p + doped
amorphous silicon carbide layer and a p + doped
amorphous silicon layer are sequentially arranged on the back face of a
silicon substrate in the direction away from the
silicon substrate; grooves which are distributed at intervals and penetrate through the p + doped
amorphous silicon layer are formed in the p + doped amorphous
silicon layer, then channels are formed in the junctions of the grooves and the p + doped amorphous silicon layer, the tunneling
oxide layer is divided into a P region and an N region, the p + doped amorphous
silicon carbide layer and the p + doped amorphous silicon layer are arranged on the P region, and the p + doped amorphous
silicon carbide layer is arranged on the N region; performing
crystallization treatment, so that the p + doped amorphous
silicon carbide layer and the p + doped amorphous silicon layer on the P region are respectively converted into a p + doped
polycrystalline silicon carbide layer and a p + doped
polycrystalline silicon layer, and the p + doped amorphous silicon
carbide layer on the N region is converted into an n + doped
polycrystalline silicon carbide layer; and performing post-treatment to obtain the
solar cell.