The invention provides a
radiation-sensitive composition and a pattern forming method. The
radiation-sensitive composition can fully exert sensitivity or pattern rectangularity, pattern circularity,
exposure latitude, focal depth, development defect inhibition, LWR and CDU when forming a
resist pattern, and has good storage stability. A
radiation-sensitive composition comprising: an
onium salt compound represented by formula (1); a
polymer; and a
solvent. (In formula (1), Rf represents a
halogen atom or a cyano group. And n represents an integer of 0-4. When n is 2 or more, the plurality of Rf are the same as or different from each other. R1 represents a monovalent
organic group having 1-20 carbon atoms, a
hydrogen atom, a
halogen atom, a cyano group, or an
alkyl fluoride group, said monovalent
organic group being bonded to the
carbon atom to which R1 is bonded via-COO-,-OCO-,-SO2-,-S-,-CO-,-O-CO-O-,-CONR '-, or-NR' CO-. R'each independently represents a
hydrogen atom or a monovalent
hydrocarbon group having 1-10 carbon atoms; and R1 represents a
carbon atom to which R1 is bonded. In the formula, when n is 0, R1 is a
halogen atom or a cyano group. And R2 is a hydroxyl group, a nitro group, an amino group, a carboxyl group or a monovalent
organic group with 1-20 carbon atoms. And m represents an integer of 0-4. When m is 2 or more, the plurality of R2 may be the same as or different from each other. And n + m represents an integer of 0-4. Ar is a monovalent organic group having an aromatic ring having a ring member number of 5-40. And X is
methylene,-O-,-CO-or-SO2-. Wherein, when X is a
methylene group, the aromatic ring of Ar is directly bonded to S + in the formula, and R1 does not include a polymerizable group. And each of R41, R42, R43, R44, R45 and R48 independently represents a
hydrogen atom, a hydroxyl group, a halogen atom or a monovalent organic group having 1-20 carbon atoms. And R46 and R47 each independently represent a
hydrogen atom, a hydroxyl group, a halogen atom, or a monovalent organic group having 1-20 carbon atoms, or each represents a ring structure having 3-10 ring members in which R46 and R47 are bonded to each other and are configured together with the two carbon atoms to which these are bonded.) (In the formula, R46 and R47 each independently represent a
hydrogen atom, a hydroxyl group, a halogen atom, or a monovalent organic group having 1-20 carbon atoms.