Patents
Literature
Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.

133 results about "Simple aromatic ring" patented technology

Simple aromatic rings, also known as simple arenes or simple aromatics, are aromatic organic compounds that consist only of a conjugated planar ring system. Many simple aromatic rings have trivial names. They are usually found as substructures of more complex molecules ("substituted aromatics"). Typical simple aromatic compounds are benzene, indole, and pyridine.

Spherical porous carbon and method for preparing same, use thereof

The application relates to the technical field of porous carbon materials, in particular to a spherical porous carbon and a preparation method and application thereof. The preparation method of the spherical porous carbon comprises the following steps: respectively providing a water-phase mixed solution and an oil-phase mixed solution; wherein the water-phase mixed solution comprises a stabilizer, a dispersant and water; the oil-phase mixed solution comprises an aromatic ring-containing alkenyl monomer, a crosslinking agent, a pore-forming agent and an initiator; the oil-phase mixed solution is added into the water-phase mixed solution, a polymerization reaction is carried out under a first inert atmosphere, and a spherical aromatic ring alkenyl polymer is prepared; the spherical aromatic ring alkenyl polymer is sequentially subjected to pre-oxidation treatment under an oxidizing atmosphere, carbonization treatment under a second inert atmosphere and activation treatment under an activating agent, and the spherical porous carbon is prepared. The preparation method of the spherical porous carbon provided by the application does not need sulfonation, the preparation process is simple, and large-scale production can be easily realized.
Owner:SUZHOU NANOMICRO TECH CO LTD +1

A high-temperature proton exchange membrane and a preparation method and application thereof

The application relates to a high-temperature proton exchange membrane and a preparation method and application thereof, the preparation method comprising the following steps: S1. mixing a branched monomer containing an aromatic ring, an aromatic ring monomer containing two reactive sites and a nitrogen-containing heterocyclic monomer, and then carrying out a Friedel-Crafts reaction to obtain a hyperbranched terpolymer; S2. mixing components including the terpolymer and a solvent to obtain a casting solution, pouring, drying and obtaining a film; and S3. adsorbing phosphoric acid on the film, and the high-temperature proton exchange membrane is obtained. The high-temperature proton exchange membrane has excellent proton conductivity, proton conductivity retention rate, phosphoric acid retention rate and peak power density under the condition that the phosphoric acid adsorption amount of the high-temperature proton exchange membrane is unchanged or reduced, and is suitable for preparing a high-performance high-temperature proton exchange membrane fuel cell with excellent durability.
Owner:HENAN ACADEMY OF SCI CHEM RES INST CO LTD +1

Polishing liquid for CMP, polishing liquid set for CMP, and polishing method

A polishing liquid for CMP, the polishing liquid containing abrasive grains, a nitrogen-containing compound, and water, in which the abrasive grains include cerium-based particles, and the nitrogen-containing compound includes a compound A1 having a fused ring (a fused ring having an aromatic five-membered ring with one nitrogen atom), a compound A2 having a quinoline ring and one hydroxy group bonded to the quinoline ring, a compound A3 having an aromatic ring and a hydroxy group bonded to a nitrogen atom, or a compound A4 having a nitrogen-containing aromatic ring to which at least one selected from the group consisting of a hydroxy group and an amino group is bonded.
Owner:RESONAC CORP

A polyisobutylene succinimide dispersant, its preparation method and application

PendingCN122344284APolymer scienceOil additive
The application belongs to the technical field of lubricating oil additives, and particularly relates to a polyisobutylene succinimide dispersant as well as a preparation method and application thereof. The preparation method comprises the following steps: mixing polyisobutylene maleic anhydride, base oil and aromatic hydrocarbon solvent, then adding aminobenzene boronic acid, and performing reaction by increasing temperature to reflux temperature, and obtaining the polyisobutylene succinimide dispersant after filtration. The polyisobutylene succinimide dispersant is prepared by using polyisobutylene maleic anhydride and aminobenzene boronic acid, the molecular structure of the polyisobutylene succinimide dispersant contains not only an aromatic ring but also an oxygen-containing benzene boronic acid group, the aromatic ring and the benzene boronic acid group both have a good adsorption effect on soot particles, and the ability of the polyisobutylene succinimide dispersant to disperse soot is improved. The performance test results show that the oil product prepared by using the polyisobutylene succinimide dispersant of the application not only improves the soot dispersion performance of the oil product, but also improves the high-temperature detergency of the oil product, and the preparation process is simple and easy to implement.
Owner:PETROCHINA CO LTD

Polyamide acid, polyamide acid composition, polyimide, polyimide film, laminate, method for producing laminate, and electronic device

PCT designated stageWO2026141550A1ImidePolymer science
A polyamide acid according to the present invention includes a tetracarboxylic acid dianhydride residue and a diamine residue. The tetracarboxylic acid dianhydride residue includes a 3,3',4,4'- biphenyltetracarboxylic acid dianhydride residue. The diamine residue includes a p-phenylenediamine residue and a siloxane diamine residue. At least one of the tetracarboxylic acid dianhydride residue and the diamine residue further includes a residue derived from a compound in which a plurality of aromatic rings are linked via a linking group. The linking group is one or more items selected from the group consisting of ether groups and ester groups.
Owner:KANEKA CORP

Reactive hot melt adhesive and structure

The invention relates to a reactive hot melt adhesive and a structure. The purpose of the present invention is to provide a reactive hot-melt adhesive having excellent ejection properties from an ejection dispenser and excellent stretchability after curing. This reactive hot melt adhesive contains a urethane prepolymer that is a reaction product of a polyol and a polyisocyanate. The urethane prepolymer satisfies the following conditions: Condition A: the proportion of an amorphous polyol in the entire polyol is 50% by mass or more; condition B: the equivalence ratio of the isocyanate group NCO of the polyisocyanate to the hydroxyl group OH of the polyol is 1.6 or more in terms of NCO / OH. Condition C: the proportion of aromatic rings derived from a polyol in the entire urethane prepolymer is 15% by mass or less. And condition D: the viscosity of the urethane prepolymer at 120 DEG C is 30 Pa.s or less.
Owner:RESONAC CORP

Aromatic ring-fused thienodiazepine compounds and uses thereof

The present disclosure belongs to the technical field of medicine, and relates to an aromatic ring and thiazodiazepine compound and use thereof, and further relates to a preparation method of the aromatic ring and thiazodiazepine compound and a pharmaceutical composition containing the compound. The present disclosure specifically relates to a compound of formula (I), a stereoisomer thereof or a pharmaceutically acceptable salt thereof and use thereof.
Owner:CHIA TAI TIANQING PHARMA GRP CO LTD

A method of deaminative functionalization of a fatty nitroamine

PendingCN122079973ARealize deamination functionalization reactionRaw materials are cheap and easy to getOrganic compound preparationCarboxylic acid nitrile preparationArylNitroamine
This invention discloses a method for the deamination functionalization of aliphatic nitrosamines, comprising: reacting an aliphatic nitrosamine as shown in formula (II) with a nucleophile in the presence of an acid and a solvent to generate a deamination functionalized product as shown in formula (III); wherein, R 1 R 2 R 3 Each group is independently selected from hydrogen, hydroxyl, alkyl, alkoxy, alkanoyl, alkoxycarbonyl, alkylsulfinyl, alkylsulfonyl, aryl, heteroaryl, phenylalkyl, or R 1 R 2 R 3 Two or three of the functional groups form a non-aromatic ring, cage-like compound; FG is a functional group in which a nucleophile participates in the reaction. The method of this invention has the advantages of inexpensive and readily available raw materials, simple reaction conditions, and wide substrate applicability.
Owner:HANGZHOU INST FOR ADVANCED STUDY UCAS

Polyolefin composite material, method for producing the same, and use thereof

This invention discloses a polyolefin composite material, its preparation method, and its application. The polyolefin composite material comprises the following components by weight: 88-112 parts polyolefin resin; 0.5-4 parts organic pigment yellow; 0.1-1.5 parts phthalocyanine green; and 1-15 parts dispersing agent. The dispersing agent comprises polar-group grafted olefin polymers and / or aromatic cyclic olefin copolymers. The polar groups in the polar-group grafted olefin polymers include one or more of the following: phosphate ester groups, phosphate groups, sulfonic acid groups, sulfonate groups, carboxylic acid groups, carboxylate groups, amino groups, quaternary ammonium salt groups, amide groups, acrylic acid groups, or maleic anhydride groups. This invention, by adding specific dispersing agents to a high-chroma polyolefin system, obtains a polyolefin composite material with high chroma and good precipitation performance.
Owner:KINGFA SCI & TECH CO LTD

A tyrosine-based HDAC inhibitor, its synthesis method and application

ActiveCN122079826Agood antitumor activityReduce entropy lossUrea derivatives preparationOrganic compound preparationHydroxamic acidTyrosine
This invention belongs to the field of pharmaceutical preparation technology, specifically relating to an HDAC inhibitor based on a tyrosine backbone, its synthesis method, and its application. The invention uses L-tyrosine as the backbone, with its aromatic ring as the Cap region, linked by a flexible alkyl chain via an ether bond, and terminated by an isohydroxamic acid group (ZBG). The tyrosine backbone provides a rigid structure, reducing entropy loss and enhancing hydrophobic interactions with the HDAC surface. By introducing substituents (such as halogens, methyl groups, etc.) onto the tyrosine benzene ring, the affinity with the HDAC active pocket is further optimized. The prepared compound b19 exhibits an HDAC inhibition capacity of 100%. 50 The concentration reached 26.8 nM, exhibiting superior antitumor activity compared to SAHA, especially against solid tumors such as HeLa cells with IC50. 50 It is 0.55 μM.
Owner:THE SECOND PEOPLES HOSPITAL OF SHANDONG PROVINCE (SHANDONG PROVINCIAL EAR NOSE & THROAT HOSPITAL SHANDONG PROVINCIAL INST OF EAR NOSE & THROAT)

Composite comprising a metallic reinforcing element and an elastomeric composition comprising a phenol-aldehyde resin

PendingFR3170483A1ElastomerPolymer science
The invention relates to a composite comprising at least one reinforcing element having a surface comprising a copper-zinc alloy, said reinforcing element being embedded in an elastomeric composition based on at least one diene elastomer, a reinforcing filler, a sulfur-based crosslinking system comprising a metal oxide, stearic acid or one of its derivatives and a vulcanization accelerator, and a phenol-aldehyde resin based on: - at least one aromatic polyphenol comprising at least one aromatic ring bearing at least two hydroxyl functions in meta positions relative to each other, the two ortho positions of at least one of the hydroxyl functions being unsubstituted, and - at least one dialdehyde compound comprising two aldehyde functions, in which the phenol-aldehyde resin content ranges from 0.5 to 2 parts per million, and the mass ratio of metal oxide to stearic acid or one of its derivatives is greater than or equal to 8.
Owner:MICHELIN & CO (CIE GEN DES ESTAB MICHELIN)

Carbon nanotube composite dispersants and carbon nanotube dispersions

This invention discloses a carbon nanotube composite dispersant and a carbon nanotube dispersion. The carbon nanotube composite dispersant is composed of an anionic dispersant and a cationic dispersant, wherein the anionic dispersant is a small molecule containing an aromatic ring anion, and the cationic dispersant is a cationic water-soluble polymer. This invention also discloses a carbon nanotube dispersion obtained based on this carbon nanotube composite dispersant. This composite dispersant utilizes the strong electrostatic attraction between anions and cations, resulting in a carbon nanotube dispersion with advantages such as fewer defects, smaller particle size, and better conductivity, as well as being environmentally friendly and stable. This composite dispersant is based on common dispersants and has a significant cost advantage.
Owner:ANHUI UNIV

resin film

PendingCN122095028ANot easy to change colorInhibit atomizationPolyesterDiketone
This invention provides a resin film that does not easily discolor even after prolonged exposure to high temperatures and suppresses fogging. The resin film of this invention comprises a thermoplastic resin, a polyester plasticizer, a β-diketone having an aromatic ring, and an ultraviolet absorber. Preferably, the polyester plasticizer comprises an aliphatic ester compound or an alicyclic ester compound.
Owner:BANDO CHEM IND LTD

Polyimide materials for glass substrate modification

PendingCN122302278AImidePolymer science
This invention provides a polyimide material for modifying glass substrates. Specifically, this invention relates to a polyimide precursor composition comprising an amide ester oligomer having the structure of formula (I): (I), wherein G, R x and n as defined herein, and each P is an independent divalent organic group, wherein, based on the total molar number of all divalent organic groups P in the composition, about 1 mol% to about 20 mol% of the divalent organic groups P are diamine residues selected from nitrogen-containing heteroaromatic rings having at least two nitrogen atoms, aromatic rings or heterocycles having at least two -COOH groups, and about 0.5 mol% to about 40 mol% of the divalent organic groups P are, wherein R 1 R 2 R 3 R 4 R 5 R 6 And m is as defined in this article.
Owner:ETERNAL MATERIALS CO LTD

Solid battery and preparation method of solid battery

A solid battery, and a method of preparing an solid battery. The solid battery includes: a cathode; an anode; and a solid electrolyte layer between the cathode and the anode. The solid electrolyte layer comprises one or a plurality of sub-solid electrolyte layers. The solid electrolyte layer comprises an interlayer between the plurality of sub-solid electrolyte layers or does not comprise the interlayer. At least one of the sub-solid electrolyte layer or the interlayer, if present, comprises a tackifier. The tackifier comprises a hydrocarbonaceous oligomer derived from an aliphatic chain monomer having 5 carbon atoms to 20 carbon atoms, an aromatic ring monomer having 6 carbon atoms to 20 carbon atoms, an aliphatic ring monomer having 5 carbon atoms to 20 carbon atoms, or a combination thereof.
Owner:SAMSUNG SDI CO LTD

Aluminum-based oxyhalide solid-state electrolyte with a coating layer and preparation method and application thereof

This invention relates to the field of solid electrolyte materials technology, and more particularly to an aluminum-based halide oxide solid electrolyte with a coating layer, its preparation method, and its application. The aluminum-based halide oxide solid electrolyte with a coating layer comprises aluminum-based halide oxide solid electrolyte particles and a coating layer covering the surface of the aluminum-based halide oxide solid electrolyte particles. The coating layer is made of a salt containing triphenyl carbocations or a salt containing triphenyl sulfide cations. Its cations have a three-conjugated aromatic ring structure, exhibiting excellent hydrophobicity. Simultaneously, under the driving force of acid-base reactions, the positively charged acidic groups in the coating layer fully react with the hygroscopic chloride anions in the material to generate a uniform and dense coating layer in situ, thereby improving the moisture resistance of the aluminum-based halide oxide solid electrolyte. Furthermore, this structure does not destroy the special viscoelastic physical properties inherent in the aluminum-based halide oxide solid electrolyte and exhibits high ionic conductivity.
Owner:SOUTHERN UNIVERSITY OF SCIENCE AND TECHNOLOGY

Adhesive film composition for heavy-duty pad manufacturing, and its preparation method

This invention discloses a film composition for remanufacturing of pads, its preparation method, and a method for recycling the remanufactured pads. The composition comprises a polymer resin, an inorganic filler, and a curing component. The polymer resin includes: a main resin comprising a modified phenolic resin; and a modified resin comprising a structural resin and a toughening resin. The structural resin comprises a polymer with aromatic rings and / or heterocyclic rings in its main chain, and the toughening resin is selected from at least one of thermoplastic resins and rubber materials. The curing component includes a thermosetting agent. This invention effectively solves the technical problems of numerous air bubbles in the filling holes, brittle and easily chipped cured layers, and severe drilling burrs in existing pad remanufacturing technologies. This film composition exhibits excellent film-forming properties, rheological filling properties, and heat-resistant dimensional stability, enabling high-quality regeneration and recycling of waste drilled pads.
Owner:杨柳

Process of Making 2,2,6,6,7,8,8-heptamethyl-3,6,7,8-tetrahydro-2H-indeno[4,5-b]furan and Its Uses

PendingUS20260146033A1Organic chemistryMolecular sieve catalystsFuranSynthetic musk
This disclosure relates to a process which involves using 1,1,2,3,3-pentamethyl-5-(2-methylallyl)-1,2,3,5,6,7-hexahydro-4H-inden-4-one (Methallyl Indomuscone) and / or 5-(2-hydroxy-2-methylpropyl)-1, 1,2,3,3-pentamethyl-1,2,3,5,6,7-hexahydro-4H-inden-4-one (Hydroxyisobutyl Indomuscone) as starting material to make 2,2,6,6,7,8,8-heptamethyl-3,6,7,8-tetrahydro-2H-indeno[4,5-b]furan (Aromatic Cyclized Compound). This disclosure also relates to an anaerobic process which involves using Methallyl Indomuscone and / or Hydroxyisobutyl Indomuscone as starting material to make intermediate compound(s) which can be used to make Aromatic Cyclized Compound or 2,2,6,6,7,8,8-heptamethyldecahydro-2H-indeno[4,5-b]furan (Musk Indenofuran). This disclosure also relates to a process for making Musk Indenofuran through Aromatic Cyclized Compound as an intermediate. This disclosure also relates to a one-pot process for making Musk Indenofuran by using Hydroxyisobutyl Indomuscone as the starting material. This disclosure also relates to a phosphine derivative compound of structural formula (X) and a process of making it.wherein R is selected from the group consisting of alkyl group, cycloalkyl group, phenyl group, substituted phenyl group, and perfluorinated alkyl group.
Owner:INTERNATIONAL FLAVORS & FRAGRANCES INC

Self-emulsifying polyether amine curing agent, preparation method and application thereof

PendingCN122444973APolymer sciencePhenol
The application discloses a self-emulsifying polyether amine curing agent and a preparation method and application thereof, and belongs to the field of high polymer materials. According to the application, components A-F are composed of polypropylene glycol or polytetrahydrofuran glycol with a molecular weight range of 800-2000, component B is selected from at least one of isophorone diamine, dicyclohexyl methane diamine or xylylenediamine, component C is at least one of epoxy derivatives containing long-chain alkyl and aromatic ring structures, component D is polyethylene glycol monomethyl ether amine with a polymerization degree range of 2-5 or an amine compound containing a sulfonic acid group, component E is a tertiary amine compound, and component F is at least one of a hindered phenol antioxidant and a phosphite antioxidant. The curing agent is reliably enhanced in reaction activity at normal temperature, the nucleophilic activity of terminal amino groups is significantly improved while excellent water dispersibility is maintained, and thus the curing rate at normal temperature is greatly accelerated.
Owner:GUANGZHOU YUDA ELECTRONIC TECH CO LTD

Process for producing tellurium-containing compounds and polymers

A tellurium-containing compound represented by any one of formulas (1) to (4): R 1 represents an unsubstituted alkyl group having 2 to 6 carbon atoms, R 2 and R 3 each independently represents a hydrogen atom, or a substituted or unsubstituted alkyl group having 1 to 6 carbon atoms, Ar represents a substituted or unsubstituted aryl group having 5 to 18 atoms constituting an aromatic ring, R f represents a perfluoroalkyl group having 1 to 12 carbon atoms, A represents a substituted or unsubstituted alkyl group having 1 to 12 carbon atoms, or a substituted or unsubstituted aryl group having 5 to 18 atoms constituting an aromatic ring, X represents a hydrogen atom, a fluorine atom, a CF2-Z group or a CHF-Z group, Y represents a CF2-Z group or a CHF-Z group, and Z represents a fluorine atom or an organic group having 1 to 12 carbon atoms.
Owner:AGC INC

Polymer material

PendingUS20260201082A1Polymer scienceLight irradiation
Provided is a polymer material including a hydroxyl group-containing polymer which is acetalized with a compound represented by Formula (1), in which the hydroxyl group-containing polymer contains two or more hydroxyl groups in a main chain and / or a side chain, and the polymer material forms a crosslinked substance by irradiation with light.[In the formula, R1 represents a hydrogen atom or the like, R2 represents a single bond or the like, and R3 represents a hydroxyl group or the like. n represents an integer of 0 or 1 representing a monocycle or a fused ring. m represents the number of R3 bonded to an aromatic ring, m represents an integer of 0 to 4 in a case where n represents 0, and m represents an integer of 0 to 6 in a case where n represents 1.]
Owner:NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE & TECHNOLOGY

Ultraviolet-curable resin composition and display device

PendingUS20260184945A1MethacrylatePolymer science
An ultraviolet-curable resin composition containing a component which is a monofunctional aromatic (meth)acrylate having one aromatic ring and a component which is a monofunctional aromatic (meth)acrylate having two or more aromatic rings, in which a total content of the component and the component is 70 parts by mass or more with respect to 100 parts by mass of a total content of polymerizable compounds in the ultraviolet-curable resin composition.
Owner:MITSUI CHEMICALS INC

Liquid crystal alignment agent, liquid crystal alignment film and method for manufacturing the same, and liquid crystal element and method for manufacturing the same

PendingJP2026087169ANon-linear opticsCyclic etherStructural unit
To provide a liquid crystal alignment agent that can produce a liquid crystal element exhibiting good liquid crystal alignment properties, low charge accumulation, and rapid residual charge relaxation, as well as a liquid crystal alignment film with high strength. [Solution] A polymer (A) containing structural units derived from a monomer having a substructure represented by formula (1), and a group F which is at least one selected from the group consisting of polymerizable carbon-carbon unsaturated bond-containing groups, isocyanate groups, protected isocyanate groups, cyclic carbonate groups, groups having a ketene structure, groups having a meldrum acid structure, cyclic ether groups, cyclic thioether groups, oxazoline groups, protected hydroxyalkylamide groups, protected thiol groups, and protected secondary amino groups. 1 A liquid crystal alignment agent containing a compound (B) having a total of two or more of in one molecule and lacking an aromatic ring. In formula (1), Ar 1 and Ar 2 This is a divalent aromatic ring group, etc. 1 X is a hydrogen atom, etc. 1 is -O- etc. TIFF2026087169000033.tif20169
Owner:JSR CORPORATION

Resin composition, prepreg, laminated plate, printed wiring board, and semiconductor package

The present invention relates to a resin composition containing (A) one or more selected from the group consisting of maleimide resins having one or more N-substituted maleimide groups, and derivatives of the maleimide resins and (B) a phosphate ester compound containing two or more phosphorus atoms, in which the group connecting at least two phosphorus atoms contains two or more aromatic rings, a prepreg, a laminated plate, a resin film, a printed wiring board and a semiconductor package, using the resin composition.
Owner:RESONAC CORP

Organic compounds and organic light-emitting devices

To provide an organic compound exhibiting a high oscillator strength. 【Solution means】A compound characterized by being represented by the general formula G1. TIFF2026093344000031.tif5278 (Ring C is an aromatic hydrocarbon ring or a heteroaromatic ring. A 11 to A 15 , A 21 to A 25 is CR A or N. R A is H or a substituent. X 1 and X 2 are O, S, Te, Se or NR B , R B is H or a substituent. Adjacent R A to each other, or adjacent R A and R B may combine to form a ring.)
Owner:CANON KK

Semiconductor adhesive, adhesive tape, semiconductor device manufacturing method, and semiconductor device

A semiconductor adhesive containing a thermosetting resin, a curing agent, a thermoplastic resin, and a filler, wherein: the thermosetting resin comprises an epoxy resin which is solid at 30°C and an epoxy resin which is liquid at 30°C; and the epoxy resin which is solid at 30°C comprises a compound having a structure in which two or more rings selected from the group consisting of aliphatic rings and aromatic rings are directly bonded, and having a monocyclic aromatic ring in which at least one hydrogen atom is substituted with a glycidyloxy group.
Owner:RESONAC CORP

Method for manufacturing semiconductor substrate, composition for forming resist underlayer film, and method for manufacturing nitrogen-containing compound

Provided is a method for producing a semiconductor substrate using a composition capable of forming a film excellent in filling properties and planarity, a composition for forming an antireflection film, and a method for producing a nitrogen-containing compound. A method for producing a semiconductor substrate includes: a step of directly or indirectly applying a composition for forming an antireflection film on a substrate; a step of directly or indirectly forming an antireflection pattern on an antireflection film formed by the application step; and a step of performing etching with the antireflection pattern as a mask, and the composition for forming an antireflection film contains a nitrogen-containing compound and a solvent, the nitrogen-containing compound including a partial structure represented by the following formula (1). (In formula (1), Ar 1 is a substituted or unsubstituted aromatic ring having 5 to 40 ring members including a carbon-carbon double bond in the formula. Each is a bonding site to another structure in the nitrogen-containing compound.)
Owner:JSR CORPORATION

Composition for forming silicon-containing metal hard mask and patterning process

ActiveUS12668700B2Metal oxide nanoparticlesSimple aromatic ring
The present invention is a composition for forming a silicon-containing metal hard mask, including: (A) a metal oxide nanoparticle; (B) a thermally crosslinkable polysiloxane (Sx) having no aromatic-ring-containing organic group; and (C) a solvent. This provides a composition for forming a silicon-containing metal hard mask that has a high effect of inhibiting collapse of an ultrafine pattern in a multilayer resist method, that can form a resist pattern having excellent LWR, that has more excellent dry etching resistance and wet removability than a conventional silicon-containing underlayer film material, and that has more excellent filling ability than a conventional metal hard mask material.
Owner:SHIN ETSU CHEMICAL CO LTD