Special radiator fan structure for microelectronic equipment
Patent Information
- Authority / Receiving Office
- CN ยท China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- ANHUI UNIVERSITY OF TECHNOLOGY AND SCIENCE
- Publication Date
- 2018-01-23
Smart Images

Figure 1 
Figure 2 
Figure 3
Abstract
Description
technical field
[0001] The invention relates to the technical field of microelectronic equipment, in particular to a cooling fan structure dedicated to microelectronic equipment. Background technique
[0002] Microelectronics technology is a new technology developed along with integrated circuits, especially VLSIs. The theoretical basis of its development is modern physics established from the end of the 19th century to the 1930s. Microelectronics technology includes a series of specialized technologies such as system circuit design, device physics, process technology, material preparation, automatic testing, packaging, and assembly. , Microelectronics technology is the sum of various process technologies in microelectronics. Due to the small size and high power operation of microelectronic equipment, it generates very high heat, and excessive heat will easily reduce the operating efficiency of microelectronic equipment such as chips. , At the same time, it is easy to burn ...