Production method of ultra pure electronic grade hydrochloric acid and isopropanol

A production method and electronic-grade technology, applied in chemical instruments and methods, halogen/halogen acid, chlorine/hydrogen chloride purification, etc., can solve the problems of complex equipment and limited purity, achieve steam saving, avoid high impurity content, improve Yield effect

Inactive Publication Date: 2019-01-15
XIAN HUIZE INTPROP OPERATIONS MANAGEMENT CO LTD
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

Although electronic grade hydrochloric acid can be prepared, the equipment used in this method is too complicated
[0009] Patent CN1326766C discloses a production process for preparing electronic grade hydrochloric acid. The purity of the produced product can only meet the MOS grade or BV-Ⅲ grade standard for VLSI production, and the purity is limited.

Method used

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  • Production method of ultra pure electronic grade hydrochloric acid and isopropanol

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Embodiment Construction

[0034] refer to figure 1 , taking the rectifying tower as an example, the preparation method of the ultrapure electronic grade chemical reagent of the present invention is specifically introduced as follows:

[0035] Step 1: At room temperature, input industrial grade hydrochloric acid or industrial grade isopropanol into the preprocessor through the industrial grade raw material tank, and pretreatment reagents such as dehydrating agent, dearsenic agent, oxidizing agent, reducing agent, etc. pass through the pretreatment reagent tank Enter the pre-processor to chemically pre-treat industrial-grade raw materials to remove major impurities to improve purity.

[0036] Filter and collect the filtrate.

[0037] Step 2: Transfer the filtrate to a rectification tower for rectification.

[0038] During rectification, the gas flow in the tower is controlled at 0.5-1.5 m / s.

[0039] A heater is installed in the rectification tower. During the rectification process, the steam is furth...

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Abstract

The invention relates to a production method of ultra pure electronic grade hydrochloric acid and isopropanol. The method includes: adopting an industrial grade purity reagent as the raw material, conducting chemical pretreatment and filtration, and subjecting the obtained filtrate to rectification; heating the steam in the rectification process to form superheated steam, and subjecting the superheated steam to membrane filtration by a microporous membrane to remove solid impurity particles; and cooling the steam and then performing secondary membrane filtration to remove dust particles. Through the above design, the production method of ultra pure electronic grade hydrochloric acid and isopropanol provided by the invention is applicable to large-scale continuous production of SEMI-C12 standard ultra pure electronic grade isopropanol and SEMI-C8 standard ultra pure electronic grade hydrochloric acid.

Description

technical field [0001] The invention relates to a production method of electronic-grade chemical reagents, in particular to a production method of ultra-pure electronic-grade hydrochloric acid and ultra-pure electronic-grade isopropanol. Background technique [0002] Ultra-pure electronic grade chemical reagents, also known as process chemicals, or wet chemicals, are one of the key basic chemical materials in the process of VLSI fabrication. Ultra-pure electronic grade hydrochloric acid and isopropanol are very important varieties of microelectronic chemical reagents, and have been widely used in the production of semiconductor components, VLSI assembly, and cleaning and corrosion during processing. [0003] In recent years, due to the rapid development of the IT industry, the requirements for the purity of the chemical reagents used are getting higher and higher, especially as the size of integrated circuits is miniaturized and the processing is speeding up, more and more r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07C29/76C07C29/80C07C31/10C01B7/07
CPCC07C29/76C01B7/0706C01B7/0712C07C29/80C07C31/10
Inventor 王玉栋杨帅遥
Owner XIAN HUIZE INTPROP OPERATIONS MANAGEMENT CO LTD
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