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Ultra-precise five-degree-of-freedom piezoelectric motion platform and excitation method thereof

A motion platform, ultra-precise technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve problems such as poor quick response ability, stroke limit, complex structure, etc.

Active Publication Date: 2019-05-31
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Generally speaking, piezoelectric drive is a drive method that uses the inverse piezoelectric effect of piezoelectric materials to convert input electrical energy to output mechanical energy. To achieve ultra-precision multi-degree-of-freedom drive, the current more mature way is to use multi-stage series Piezoelectric stack drive, but this method has high cost, poor quick response ability, complex structure, and relatively limited stroke. Therefore, in the field of ultra-precision positioning that has high requirements for the volume and stroke of the driver The application of the system has been greatly restricted, so inventing a multi-degree-of-freedom ultra-precision piezoelectric actuator with a compact structure and low cost has its actual needs and practical significance

Method used

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  • Ultra-precise five-degree-of-freedom piezoelectric motion platform and excitation method thereof
  • Ultra-precise five-degree-of-freedom piezoelectric motion platform and excitation method thereof
  • Ultra-precise five-degree-of-freedom piezoelectric motion platform and excitation method thereof

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specific Embodiment 1

[0077] The following is attached with the manual figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 This embodiment will be further described in detail. This embodiment provides a figure 1 The ultra-precise five-degree-of-freedom piezoelectric motion platform shown. The motion platform includes a mover 1, a multi-output drive unit 2, a transverse guide rail 3, a longitudinal guide rail 4, a support plate 5, a single output drive unit 6, a lateral pressure plate 7 and a base 8; the multi-output drive unit 2 includes The upper side driving foot 2-1, the upper side two-way bending unit 2-2, the fixing clip 2-3, the lower side two-way bending unit 2-4 and the lower side driving foot 2-5; the single output driving unit 6 includes a press The electric ceramic sheet 6-1 and the middle driving foot 6-2; the upper driving foot 2-1, the upper bidirectional bending unit 2-2, the fixing clip 2-3, the lower bidirectional bending unit 2-4 and the lower The side drive legs 2-5 ar...

specific Embodiment 2

[0081] The following is attached with the manual figure 1 , Figure 6 , Figure 7 , Figure 8 This embodiment will be further described in detail. This embodiment provides a figure 1 The excitation method of the ultra-precision five-degree-of-freedom piezoelectric motion platform is shown. This excitation method can realize the ultra-precision four-degree-of-freedom movement of the mover 1 with a large output stroke, including linear motion along the Y-axis direction and the X-axis direction and orbiting The rotational movement in the Y-axis direction and the X-axis direction can realize nanoscale resolution by adjusting the amplitude and application time of the excitation voltage signal.

[0082] The excitation method for realizing the two-way linear motion of the mover 1 along the Y-axis direction includes the following steps:

[0083] The first step: press the mover 1 on the upper driving foot 2-1, and adjust the pressing force between the two, press the lower driving ...

specific Embodiment 3

[0120] The following is attached with the manual figure 1 , Figure 9 , Figure 10 , Figure 11 This embodiment will be further described in detail. This embodiment provides a figure 1 The excitation method of the ultra-precision five-degree-of-freedom piezoelectric motion platform is shown. This excitation method can realize the ultra-precision single-degree-of-freedom lifting motion of the mover 1 with a large output stroke, that is, the linear motion along the Z-axis direction. By adjusting the excitation voltage signal The amplitude and application time can achieve nanoscale resolution.

[0121] The excitation method for realizing the two-way linear motion of the mover 1 along the Z-axis direction includes the following steps:

[0122] The first step: press the mover 1 on the upper driving foot 2-1, and adjust the pressing force between the two, press the lower driving foot 2-5 on the support plate 5, and adjust the two Press the middle driving foot 6-2 against the s...

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Abstract

The invention is an ultra-precise five-degree-of-freedom piezoelectric motion platform and an excitation method thereof. The ultra-precise five-degree-of-freedom piezoelectric motion platform solves the technical problem that most multi-degree-of-freedom ultra-precise piezoelectric actuators are high in cost, complex in structure and severely limited in motion stroke. The piezoelectric motion platform is composed of a mover (1), a multi-output drive unit (2), a lateral guide rail (3), a longitudinal guide rail (4), a support plate (5), a single-output drive unit (6), and a lateral pressure plate. (7) and a base (8), wherein the multi-output drive unit (2) and the single-output drive unit (6) serve as main drive elements, and drive the ultra-precise five-degree-of-freedom motion of the mover by self-deformation and friction. Based on the excitation method in the present invention, the piezoelectric motion platform can realize multi-degree-of-freedom ultra-precise motion of large strokeand high resolution. The piezoelectric motion platform of the invention is simple and compact in structure. The excitation method is reliable and easy to execute, and has wide application prospects inthe technical field of multi-degree-of-freedom ultra-precise positioning.

Description

technical field [0001] The invention relates to the field of piezoelectric drive technology, and relates to an ultra-precise five-degree-of-freedom piezoelectric motion platform and an excitation method thereof. Background technique [0002] In recent years, under the huge demand in the fields of cell science, ultra-precision optics, and ultra-precision machining, ultra-precision instruments and equipment have developed rapidly, and the core components of ultra-precision instruments and equipment are ultra-precision drives, which are also Its biggest technical difficulty. Compared with the traditional electromagnetic drive method, piezoelectric drive, as a new type of actuation mechanism, has many advantages such as high resolution, fast response speed, flexible structural design, and good electromagnetic compatibility. The field has been widely used and researched. Generally speaking, piezoelectric drive is a drive method that uses the inverse piezoelectric effect of piez...

Claims

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Application Information

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IPC IPC(8): H02N2/00
Inventor 刘英想于洪鹏陈维山刘军考
Owner HARBIN INST OF TECH
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