Orbital angular momentum multiplexing device based on vcsel and its preparation method

A technology of orbital angular momentum and devices, which is applied to laser parts, lasers, electrical components, etc., can solve problems such as the inability to realize coaxial integrated OAM beams, and achieve the effect of low production cost and simple preparation process

Active Publication Date: 2021-02-26
SUN YAT SEN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to overcome at least one defect such as the inability to realize coaxial integrated OAM beams described in the above-mentioned prior art, the present invention provides a VCSEL-based orbital angular momentum multiplexing device to realize coaxial independent modulation of 1st, 2nd, and 3rd-order OAM beams , to ensure simultaneous transmission of multiple OAM beams

Method used

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  • Orbital angular momentum multiplexing device based on vcsel and its preparation method
  • Orbital angular momentum multiplexing device based on vcsel and its preparation method
  • Orbital angular momentum multiplexing device based on vcsel and its preparation method

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Embodiment Construction

[0031] The accompanying drawings are for illustrative purposes only and cannot be construed as limiting the patent;

[0032] In order to better illustrate this embodiment, some parts in the drawings will be omitted, enlarged or reduced, and do not represent the size of the actual product;

[0033] For those skilled in the art, it is understandable that some well-known structures and descriptions thereof may be omitted in the drawings.

[0034] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0035] Such as figure 1 Shown is a schematic structural diagram of the VCSEL-based orbital angular momentum multiplexing device of this embodiment.

[0036]The VCSEL-based orbital angular momentum multiplexing device in this embodiment includes a vertical cavity surface emitting laser 1, a silicon dioxide passivation layer 2, an SU8 planarization layer 3, a silicon nitride phase layer 4, an e...

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Abstract

The invention relates to the technical field of optoelectronic components and devices, and proposes a VCSEL-based orbital angular momentum multiplexing device, including a vertical cavity surface emitting laser, a silicon nitride phase layer, a metal shielding layer, a P-face electrode and an N-face electrode; On the cavity surface emitting laser, a cylinder, a first outer ring and a second outer ring structure are sequentially etched from the inside to the outside with the center point as the center; the silicon nitride phase layer is arranged on the upper surface of the cylindrical structure, accounting for half of the upper surface of the cylinder One area; the metal shielding layer is arranged on the upper surface of the first outer ring and the upper surface of the second outer ring and etched into a metal grating structure; the P-face electrode and the N-face electrode are arranged on the vertical cavity surface emitting laser. The present invention also proposes a preparation method of the multiplexing device, and the multiplexing device can realize coaxial independent modulation of high-purity 1st, 2nd, and 3rd-order OAM beams, and realize coaxial integration of OAM beams, and the multiplexing device The production cost is low, and the preparation process is simple.

Description

technical field [0001] The invention relates to the technical field of photoelectric elements and devices, and more specifically, to a VCSEL-based orbital angular momentum multiplexing device and a preparation method thereof. Background technique [0002] OAM (Orbital Angular Momentum, Orbital Angular Momentum) beams are considered to be the fifth dimension of light regulation after amplitude, phase, polarization, and frequency. OAM multiplexing technology uses the orthogonality of OAM modes to map different channels to different OAM modes, transmit in the same physical space, and then separate them at the receiving end, so a single physical channel can be greatly increased through OAM multiplexing transmission capacity. The VCSEL (Vertical Cavity Surface Emitting Laser, Vertical Cavity Surface Emitting Laser) has a series of advantages such as high power conversion efficiency, low threshold, low cost, and easy two-dimensional integration, and has become a good short-distan...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/183
Inventor 余思远孙雅琪朱国轩喻颖刘洁
Owner SUN YAT SEN UNIV
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