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Orbital angular momentum multiplexer based on VCSEL and preparation method thereof

A technology of orbital angular momentum and devices, which is applied to laser parts, lasers, electrical components, etc., can solve problems such as the inability to realize coaxial integrated OAM beams, and achieve the effect of low production cost and simple preparation process

Active Publication Date: 2019-06-07
SUN YAT SEN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to overcome at least one defect such as the inability to realize coaxial integrated OAM beams described in the above-mentioned prior art, the present invention provides a VCSEL-based orbital angular momentum multiplexing device to realize coaxial independent modulation of 1st, 2nd, and 3rd-order OAM beams , to ensure simultaneous transmission of multiple OAM beams

Method used

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  • Orbital angular momentum multiplexer based on VCSEL and preparation method thereof
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  • Orbital angular momentum multiplexer based on VCSEL and preparation method thereof

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Embodiment Construction

[0031] The accompanying drawings are for illustrative purposes only and cannot be construed as limiting the patent;

[0032] In order to better illustrate this embodiment, some parts in the drawings will be omitted, enlarged or reduced, and do not represent the size of the actual product;

[0033] For those skilled in the art, it is understandable that some well-known structures and descriptions thereof may be omitted in the drawings.

[0034] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0035] like figure 1 Shown is a schematic structural diagram of the VCSEL-based orbital angular momentum multiplexing device of this embodiment.

[0036]The VCSEL-based orbital angular momentum multiplexing device in this embodiment includes a vertical cavity surface emitting laser 1, a silicon dioxide passivation layer 2, an SU8 planarization layer 3, a silicon nitride phase layer 4, an elec...

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Abstract

The present invention relates to the technical field of photoelectric elements and devices, and provides an orbital angular momentum (OAM) multiplexer based on a VCSEL (Vertical Cavity Surface Emitting Laser). The multiplexer comprises a vertical cavity surface emitting laser, a silicon nitride phase layer, a metal shielding layer, a P-surface electrode and an N-surface electrode; the vertical cavity surface emitting laser takes a center point as a center of a circle and is etched with a cylinder, a first outer ring and a second outer ring structure in order from inside to outside; the siliconnitride phase layer is arranged at the upper surface of the cylinder structure, and occupies 1 / 2 area of the upper surface of the cylinder; the metal shielding layer is arranged at the upper surfaceof the first outer ring and the outer surface of the second outer ring and is etched with a metal grating structure; and the P-surface electrode and the N-surface electrode are arranged on the vertical cavity surface emitting laser. The present invention further provides a preparation method of the multiplexer. The multiplexer can achieve coaxial and independent modulation of highly purified first, second and third-order OAM light beams to achieve coaxial integration of the OAM light beam, and the multiplexer is low in manufacturing cost and simple in manufacturing process.

Description

technical field [0001] The invention relates to the technical field of photoelectric elements and devices, and more specifically, to a VCSEL-based orbital angular momentum multiplexing device and a preparation method thereof. Background technique [0002] OAM (Orbital Angular Momentum, Orbital Angular Momentum) beams are considered to be the fifth dimension of light regulation after amplitude, phase, polarization, and frequency. OAM multiplexing technology uses the orthogonality of OAM modes to map different channels to different OAM modes, transmit in the same physical space, and then separate them at the receiving end, so a single physical channel can be greatly increased through OAM multiplexing transmission capacity. The VCSEL (Vertical Cavity Surface Emitting Laser, Vertical Cavity Surface Emitting Laser) has a series of advantages such as high power conversion efficiency, low threshold, low cost, and easy two-dimensional integration, and has become a good short-distan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/183
Inventor 余思远孙雅琪朱国轩喻颖刘洁
Owner SUN YAT SEN UNIV
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