Vacuum jacketed tube

Abstract

The proposed vacuum jacketed tube may deliver the high / low temperature fluid with less temperature-transfer, especially may delivery high / low temperature fluid through a flexible structure. The vacuumjacketed tube includes a tubular structure surrounding a pipe wherein the fluid is delivered therethrough. Also, the space between the tubular structure and the pipe may be vacuumed. Therefore, the heat transferred into and / or away the fluid may be minimized, especially if the tubular structure and the pipe is separated by at least one thermal insulator or is separated mutually. Moreover, the vacuum jacketed tube may be mechanically connected to the source / destination of the delivered fluid, even other vacuum jacketed tube, through the bellows and / or the rotary joint. Besides, the pipe may besurrounded by a Teflon bellows and the tubular structure may be surrounded by a steel bellows, so as to further reduce the heat transferred into / away the fluid delivered inside the pipe.

Description

technical field [0001] The present invention relates to vacuum jacketed tubing that can transport high or low temperature fluids through flexible (non-fixed) transport pathways with low temperature transfer. In the present invention, the tubular structure surrounds the pipeline through which the fluid is conveyed and the space between the tubular structure and the pipeline is evacuated. In this way, heat transfer between the fluid being transferred and the environment can be minimized. Background technique [0002] In the semiconductor industry, liquid crystal display industry, light emitting diode industry or other related industries, the transmission of high temperature fluid and low temperature fluid is necessary. For example, factory operations must transfer liquid nitrogen from gas storage tanks located outside the factory to most machines located inside the factory. For example, in some applications, such as high or low temperature ion implantation, or even physical ...

AI Technical Summary

Problems solved by technology

[0004] In summary, there is a need for new ways of providing the transfer fluid with less heat transfer, especially if the transfer path changes (such as bending or twisting) during the transfer period, and if the temperature of the transferred fluid is high enough and / or Low enough that materials / devices traditionally used to reduce heat transfer would be significantly damaged

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