Spectrum chip based on sub-wavelength high-contrast grating, spectrograph and preparation method

Abstract

The embodiment of the invention provides a spectrum chip based on a sub-wavelength high-contrast grating, a spectrograph and a preparation method. According to the spectrum chip, a light modulation layer containing a sub-wavelength high-contrast grating structure is prepared in a photosensitive area of a wafer-level image sensor, so that the light modulation layer can modulate to-be-measured light, spectrum information of the to-be-measured light is coded to different pixels of the wafer-level image sensor, and a spectrum information image containing the to-be-measured light is obtained. According to the embodiment of the invention, the sub-wavelength high-contrast grating is prepared on the wafer-level image sensor, and the light modulation capability is stronger; the frequency spectrum information of the to-be-measured light is coded to the wafer-level image sensor, so that spectrum detection does not depend on a precisely-moving light splitting component any more, the size and costof spectrum detection equipment are reduced, optical component alignment is not needed any more, and the later maintenance cost is reduced; and monolithic integration is achieved on the wafer-level image sensor, the size is reduced, and the device yield is greatly increased.

Description

Technical field [0001] The invention relates to the technical field of optical devices, in particular to a spectrometer based on a sub-wavelength high-contrast grating, a spectrometer and a preparation method. Background technique [0002] The spectrometer can measure the light reflected from the surface of the object, and analyze and process the structure and composition of the substance by applying optical principles, so it is widely used. [0003] The existing commercial spectrometers can be divided into two types according to their working principles: monochromator-based and Fourier transform. Specifically: Based on the monochromator principle, it means that the light of different wavelengths is separated in space by a grating, and then the light of different wavelengths is filtered out with a slit, and it is detected by a photosensitive element; based on the Fourier transform principle, the light is divided into The two beams interfere with each other after passing through di...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problems existing in the prior art, the embodiment of the present invention provides a spectrum chip, a spectrometer and a preparation method based on a sub-wavelength high-contras

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